Prof. Zhenjie Yao Profile

Prof. Zhenjie Yao

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Tianshuai Qi, Peng Xu, Jingwei Xu, Song Sun, Juan Wei, Guangyu Sun, Zhao Liu, Qingchen Cao, Jiangliu Shi, Zhenjie Yao, Xijin Zhao, Chun Zhang

Proceedings Volume 12954, 129541C (2024) https://doi.org/10.1117/12.3010111

KEYWORDS: Optical proximity correction

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Keywords/Phrases