Zuan Khalik
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129550O (2024) https://doi.org/10.1117/12.3010421
KEYWORDS: Semiconducting wafers, Overlay metrology, Cross validation, Process control, Logic, Metrology, Simulations, Scanning electron microscopy, Lithography

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12496, 124960O (2023) https://doi.org/10.1117/12.2658832
KEYWORDS: Overlay metrology, Logic, Optical proximity correction, Metrology, Stochastic processes, Semiconductors, Semiconductor manufacturing, Scanners, Manufacturing, Line edge roughness

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