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Chanseob Cho
Senior Principal Engineer at GlobalFoundries
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Publications (2)
Proceedings Article | 19 March 2015 Paper
Overlay target selection for 20-nm process on A500 LCM
Vidya Ramanathan, Lokesh Subramany, Tal Itzkovich, Karsten Gutjhar, Patrick Snow, Chanseob Cho, Lipkong Yap
Proceedings Volume 9424, 942424 (2015) https://doi.org/10.1117/12.2086016
KEYWORDS: Overlay metrology, Semiconducting wafers, Back end of line, Etching, Scatterometry, Metrology, Diffractive optical elements, Front end of line, Optical properties, Inspection
Proceedings Article | 8 October 2014 Paper
Best-practice evaluation-methods for wafer-fab photomask-requalification inspection tools
Proceedings Volume 9235, 92351I (2014) https://doi.org/10.1117/12.2068466
KEYWORDS: Inspection, Defect detection, Photomasks, Reticles, Particles, Air contamination, Optical proximity correction, Contamination, SRAF, Image analysis
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