EUV grazing-incidence lensless imaging wafer metrology

Tao Shen; Paolo Ansuinelli; Iacopo Mochi; Yasin Ekinci

doi:10.1117/12.2658436

27 April 2023 EUV grazing-incidence lensless imaging wafer metrology

Tao Shen, Paolo Ansuinelli, Iacopo Mochi, Yasin Ekinci

Proceedings Volume 12496, Metrology, Inspection, and Process Control XXXVII; 124960Z (2023) https://doi.org/10.1117/12.2658436
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Non-destructive metrology for photomasks and wafers has always been an important requirement for semiconductor lithography, and with the advent of EUVL, enabling further shrinkage of semiconductor devices, the challenges in this field have increased significantly. Coherent diffraction imaging (CDI) is a promising alternative to standard imaging for EUV photomask actinic inspection. EUV light can also be used for wafer inspection to benefit from the resolution improvement allowed by its short wavelength. In order to perform lensless imaging for patterned wafers, however, we need to probe the sample surface at grazing incidence to ensure a sufficiently high reflectance. The EUV reflective grazing incidence nanoscope (REGINE) at the Swiss Light Source was develped to perform grazing incidence lensless imaging for patterned wafers. REGINE is a tool that combines CDI, scatterometry and reflectometry in the photon energy range between 80 to 200 eV, and at the grazing incidence angle of 1 to 28 degrees. In this work, we will present the latest characterization of our system, and preliminary results.

Conference Presentation

Citation Download Citation

Tao Shen, Paolo Ansuinelli, Iacopo Mochi, and Yasin Ekinci "EUV grazing-incidence lensless imaging wafer metrology", Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 124960Z (27 April 2023); https://doi.org/10.1117/12.2658436

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available