New technique for direct integration of mechanical motion with electronics on a chip

Pratul K. Ajmera; Xiaodong Wang; James Ross; Giri Nallapati; Harish M. Manohara

doi:10.1117/12.388904

21 June 2000 New technique for direct integration of mechanical motion with electronics on a chip

Pratul K. Ajmera, Xiaodong Wang, James Ross, Giri Nallapati, Harish M. Manohara

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388904
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

A novel device to directly integrate mechanical motion with electronics on a chip for system integration is designed and fabricated. The device is a laterally movable gate field effect transistor. Here the gate moves parallel to the substrate surface rather than perpendicular to its as in the moving gate transistors reported earlier. Lateral motion results in linear response of device drain current with gate motion. It also makes large motion possible. The device has a variety of applications in smart sensors, actuators and integrated smart systems. A simple fabrication process is developed that is compatible with fabrication of high-aspect ratio structures. The latter give distinct performance improvement. The basic principles of operation of the LMGFET is demonstrate din initial measurements. This, to our knowledge, is the first report on the operation of such a device.

Citation Download Citation

Pratul K. Ajmera, Xiaodong Wang, James Ross, Giri Nallapati, and Harish M. Manohara "New technique for direct integration of mechanical motion with electronics on a chip", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388904

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