Contact hole application for lithography process development using the Opti-Probe three-dimensional RT/CD technology

Zhiming Jiang; Osman Sorkhabi; Hanyou Chu; XueLong Cao; Guangwei Li; Youxian Wen; Jon L. Opsal; Yia-Chung Chang

doi:10.1117/12.556587

24 May 2004 Contact hole application for lithography process development using the Opti-Probe three-dimensional RT/CD technology

Zhiming Jiang, Osman Sorkhabi, Hanyou Chu, XueLong Cao, Guangwei Li, Youxian Wen, Jon L. Opsal, Yia-Chung Chang

Author Affiliations +

Proceedings Volume 5375, Metrology, Inspection, and Process Control for Microlithography XVIII; (2004) https://doi.org/10.1117/12.556587
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

This paper presents measurement results of the 3-D contact hole profiles using RT/CD technology for various diameter-to-space (D/S) ratios and film stacks. The key controlling parameters (hole depth, diameter, sidewall angle, and hole openness, etc.) for lithography processing of contacts and vias were studied in terms of measurement sensitivity on samples with different pitches and D/S ratios and film stacks. Good correlation (R² ~ 0.99) between CD-SEM and RT/CD was obtained for the sample structures. The static and dynamic measurement stability of contact diameter and contact depth was better than 1 nm using simple profile modeling.

Citation Download Citation

Zhiming Jiang, Osman Sorkhabi, Hanyou Chu, XueLong Cao, Guangwei Li, Youxian Wen, Jon L. Opsal, and Yia-Chung Chang "Contact hole application for lithography process development using the Opti-Probe three-dimensional RT/CD technology", Proc. SPIE 5375, Metrology, Inspection, and Process Control for Microlithography XVIII, (24 May 2004); https://doi.org/10.1117/12.556587

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available