3D microstructuring of glass by femtosecond laser direct-writing for micro-TAS application

Koji Sugioka; Ya Cheng; Masashi Masuda; Katsumi Midorikawa; Kazuhiko Shihoyama

doi:10.1117/12.552286

2 April 2004 3D microstructuring of glass by femtosecond laser direct-writing for micro-TAS application

Koji Sugioka, Ya Cheng, Masashi Masuda, Katsumi Midorikawa, Kazuhiko Shihoyama

Proceedings Volume 5399, Laser-Assisted Micro- and Nanotechnologies 2003; (2004) https://doi.org/10.1117/12.552286
Event: Laser-Assisted Micro- and Nanotechnologies 2003, 2003, St. Petersburg, Russian Federation

Abstract

Three-dimensional (3-D) microstructuring of photosensitive glass is demonstrated by using femtosecond (fs) laser for Lab-on-chip, in other words, micro total analysis system (μ-TAS), application. The fs laser direct-write process followed by a thermal treatment and chemical etching in a HF aqueous solution produces true 3-D hollow microstructures embedded in the photosensitive glass. This technique is applied for manufacturing a microfluidic structure inside the glass. Mixing of two kinds of aqueous solutions is demonstrated in the fabricated structure. A freely movable microplate is also fabricated inside glass to control a stream of reagents in the microfluidics. In the meanwhile, this technique is applied for integrating microoptics like micromirror and micro beam splitter in the glass chip for optical analysis of reactants produced in the microfluidics. This paper also discusses the mechanism of fs laser and photosensitive glass interaction.

Citation Download Citation

Koji Sugioka, Ya Cheng, Masashi Masuda, Katsumi Midorikawa, and Kazuhiko Shihoyama "3D microstructuring of glass by femtosecond laser direct-writing for micro-TAS application", Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); https://doi.org/10.1117/12.552286

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