Wavefront aberration measurement technology for microlens using the Mach-Zehnder interferometer provided with a projected aperture

Takaaki Miyashita; Kenjiro Hamanaka; Masahiko Kato; Satoshi Ishihara; Hiroyasu Sato; Eiichi Sato; Tadashi Morokuma

doi:10.1117/12.559872

2 August 2004 Wavefront aberration measurement technology for microlens using the Mach-Zehnder interferometer provided with a projected aperture

Takaaki Miyashita, Kenjiro Hamanaka, Masahiko Kato, Satoshi Ishihara, Hiroyasu Sato, Eiichi Sato, Tadashi Morokuma

Author Affiliations +

Proceedings Volume 5532, Interferometry XII: Applications; (2004) https://doi.org/10.1117/12.559872
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We have carried out wavefront aberration measurement with the reduction projection of an aperture on the pupil of the test microlens set in the interferometer optics. The size of the image of the aperture determines the effective aperture of the microlens, and proposes aperture restriction methods to reduce the influence of the Fresnel diffraction. Wavefront aberrations were measured and evaluated by the use of phase shift method applied to the Mach-Zehnder interferometer. We studied if we can form an image of an aperture stop on the pupil plane of the test microlens. The evaluation of the effect of the aperture on the fringe quality was evaluated through the prototype equipment using the microlens of less than 30 micrometers in diameter. In this paper, we describe the method of reducing the measurement error of wavefront aberration using the effective diameter of the microlens.

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Takaaki Miyashita, Kenjiro Hamanaka, Masahiko Kato, Satoshi Ishihara, Hiroyasu Sato, Eiichi Sato, and Tadashi Morokuma "Wavefront aberration measurement technology for microlens using the Mach-Zehnder interferometer provided with a projected aperture", Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); https://doi.org/10.1117/12.559872

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