LCD-based low spatial coherence interferometer

Zhihui Duan; Pavel Pavlicek; Yoko Miyamoto; Mitsuo Takeda

doi:10.1117/12.576101

7 February 2005 LCD-based low spatial coherence interferometer

Zhihui Duan, Pavel Pavlicek, Yoko Miyamoto, Mitsuo Takeda

Proceedings Volume 5636, Holography, Diffractive Optics, and Applications II; (2005) https://doi.org/10.1117/12.576101
Event: Photonics Asia, 2004, Beijing, China

Abstract

An interferometer based on the spatial coherence detection has been developed for absolute height measurement. The location of a coherence peak resulting from the illumination of an extended quasi-monochromatic spatially incoherent light source with zone-plate-like spatial structure gives the longitudinal depth information. Besides simplifying the control of the light source structure, LCD-SLM eliminates the mechanical movement. Experiments of step height detection and profilometry of an object with a rough surface are presented that demonstrate the validity of the principle.

Citation Download Citation

Zhihui Duan, Pavel Pavlicek, Yoko Miyamoto, and Mitsuo Takeda "LCD-based low spatial coherence interferometer", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); https://doi.org/10.1117/12.576101

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