Light confinement effect of nonspherical nanoscale solid immersion lenses

Myun-Sik Kim; Toralf Scharf; David Nguyen; Ethan Keeler; Skyler Rydberg; Wataru Nakagawa; Gaël D. Osowiecki; Reinhard Voelkel; Hans Peter Herzig

doi:10.1117/1.JMM.12.2.023015

12 June 2013 Light confinement effect of nonspherical nanoscale solid immersion lenses

Myun-Sik Kim, Toralf Scharf, David Nguyen, Ethan Keeler, Skyler Rydberg, Wataru Nakagawa, Gaël D. Osowiecki, Reinhard Voelkel, Hans Peter Herzig

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 2, 023015 (June 2013). https://doi.org/10.1117/1.JMM.12.2.023015

Abstract

We report on the light confinement effect observed in nonideally shaped (i.e., nonspherical) nanoscale solid immersion lenses (SIL). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these noncircular pillars become spherical, while incomplete melting results in nonspherically shaped SILs. Optical characterization shows that nonideal SILs exhibit a spot size reduction comparable with that of spherical SILs. When the size of the SIL is of wavelength scale or smaller, aberrations are negligible due to the short optical path length. This insensitivity to minor variations in the shape implies a large tolerance in nano-SIL fabrication.

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Citation Download Citation

Myun-Sik Kim, Toralf Scharf, David Nguyen, Ethan Keeler, Skyler Rydberg, Wataru Nakagawa, Gaël D. Osowiecki, Reinhard Voelkel, and Hans Peter Herzig "Light confinement effect of nonspherical nanoscale solid immersion lenses," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(2), 023015 (12 June 2013). https://doi.org/10.1117/1.JMM.12.2.023015

Published: 12 June 2013

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