Prof. Anna Szerling Profile

Prof. Anna Szerling

Head of GaN-based Devices, Sensors, Thin-film Stru at Lukasiewicz Research Network - Institute of Microelectronics and Photonics

SPIE Involvement:

Author

Publications (21)

Proceedings Article | 9 March 2024 Presentation

Presentation

Fabrication of monolithic subwavelength high-aspect ratio GaAs gratings integrated with metal for transmission of unpolarized infrared light

Karolina Bogdanowicz, Weronika Glowadzka, Oskar Sadowski, Tristan Smolka, Michal Rygala, Marcin Motyka, Marek Ekielski, Tomasz Czyszanowski, Anna Szerling

Proceedings Volume PC12895, PC128951C (2024) https://doi.org/10.1117/12.3000495

KEYWORDS: Optical gratings, Fabrication, Metals, Infrared radiation, Gallium arsenide, Polarized light, Etching, Gold, Semiconductors, Semiconductor materials

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Proceedings Article | 9 March 2024 Presentation

Presentation

Monolithic high contrast grating integrated with metal as a transparent conductive electrode for infrared optoelectronics

Marek Ekielski, Weronika Glowadzka, Karolina Bogdanowicz, Monika Mikulicz, Michal Rygala, Patrycja Spiewak, Marcin Kowalski, Marcin Gebski, Marcin Motyka, Tomasz Czyszanowski, Anna Szerling

Proceedings Volume PC12895, PC1289505 (2024) https://doi.org/10.1117/12.3009691

KEYWORDS: Electrical conductivity, Thermography, Metals, Electrodes, Technetium, Infrared radiation, Optoelectronics, Transmittance, Optoelectronic devices, Optical gratings

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Proceedings Article | 9 March 2024 Presentation

Presentation

New type of optical sensor for non-invasive detection of medical biomarkers.

Magdalena Zadura, Weronika Glowadzka, Piotr Polak, Kamil Kosiel, Joanna Jankowska-Sliwinksa, Krzysztof Piskorski, Karolina Bogdanowicz, Marek Ekielski, Tomasz Czyszanowski, Anna Szerling

Proceedings Volume PC12895, PC1289514 (2024) https://doi.org/10.1117/12.3002348

KEYWORDS: Optical sensors, Biosensors, Biological research, Sensors, Polymers, Coating thickness, Cancer detection, Structural engineering, Structural design, Sensor performance

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Proceedings Article | 21 March 2023 Presentation

Presentation

Study of ultra high pressure annealing of Si-implanted GaN epilayers with different ion fluences

Andrzej Taube, Oskar Sadowski, Iwona Sankowska, Karolina Pągowska, Marek Ekielski, Paweł Michałowski, Joanna Jankowska-Śliwińska, Jarosław Tarenko, Anna Szerling, Paweł Prystawko, Kacper Sierakowski, Piotr Jaroszyński, Michał Boćkowski, Izabella Grzegory

Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2648902

KEYWORDS: Gallium nitride, Annealing, Ions, Silicon, Diffusion, Magnesium, Ion implantation, Chemical species, X-ray diffraction, Surface roughness

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Proceedings Article | 21 March 2023 Presentation

Presentation

Optimization of bevelled mesa fabrication process for vertical GaN p-n diodes

Jarosław Tarenko, Maciej Kamiński, Renata Kruszka, Magdalena Zadura, Andrzej Taube, Marek Ekielski, Joanna Jankowska-Śliwińska, Anna Szerling, Paweł Prystawko, Michał Boćkowski, Izabella Grzegory

Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2648891

KEYWORDS: Gallium nitride, Diodes, Photomasks, Photoresist materials, Photoresist developing, Etching, Semiconductors, Scanning electron microscopy, Reactive ion etching, Profilometers

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Proceedings Article | 21 March 2023 Presentation

Presentation

Optimization of low resistivity Ti/Al/TiN/Au ohmic contacts to buffer-free AlGaN/GaN high electron mobility transistor structures

Maciej Kaminski, Oskar Sadowski, Andrzej Taube, Marek Ekielski, Jarosław Tarenko, Magdalena Zadura, Marek Wzorek, Anna Szerling

Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2648930

KEYWORDS: Transistors, Annealing, Field effect transistors, Metals, Resistance, Gallium nitride, Transmission electron microscopy, Tin, Scanning electron microscopy, Microwave radiation

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Proceedings Article | 17 March 2023 Presentation

Presentation

Sensor for non-invasive detection of SARS-CoV-2 at an early stage of infection

Joanna Jankowska-Śliwińska, Kamil Kosiel, Maciej Kozubal, Anna Szerling, Krzysztof Zaraska, Krzysztof Grabczewski, Piotr Polak, Renata Kruszka, Laura Stanco, Anna Niedzwiecka, Antonina Naskalska, Agnieszka Dabrowska, Krzysztof Pyrc

Proceedings Volume PC12430, PC1243014 (2023) https://doi.org/10.1117/12.2650124

KEYWORDS: Sensors, Proteins, Electrodes, Statistical analysis, Pathogens, Particles, Biosensors, Biological research

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Proceedings Article | 6 March 2023 Presentation

Presentation

Lossy mode resonance-based optical-fibre sensor for SARS-CoV-2 detection

Kamil Kosiel, Joanna Jankowska-Śliwińska, Anna Szerling, Piotr Polak, Krzysztof Grabczewski, Maciej Kozubal, Karina Wojciechowska, Laura Stanco, Renata Kruszka, Ryszard Buczyński, Grzegorz Stępniewski, Dariusz Pysz, Michal Szymanski, Krzysztof Domański, Piotr Prokaryn, Konrad Dudziński

Proceedings Volume PC12372, PC1237208 (2023) https://doi.org/10.1117/12.2649173

KEYWORDS: Sensors, Control systems, Thin films, Temperature metrology, Statistical analysis, Single mode fibers, Short wave infrared radiation, Proteins, Optical properties, Microfluidics

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Proceedings Article | 5 March 2022 Poster

Poster

Development of high-power normally-off p-GaN gate AlGaN/GaN high-electron mobility transistors

Anna Szerling, Andrzej Taube, Maciej Kaminski, Marek Ekielski, Jarosław Tarenko, Karolina Pągowska, Maciej Kozubal, Kamil Kosiel, Renata Kruszka, Krystyna Golaszewska-Malec, Ernest Brzozowski, Norbert Kwietniewski, Ryszard Kisiel

Proceedings Volume PC12001, PC120011L (2022) https://doi.org/10.1117/12.2611724

KEYWORDS: Transistors, Field effect transistors, Iron, Gallium nitride, Etching, Silica, Resistance, Electronics, Silicon carbide, Semiconductor manufacturing

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Proceedings Article | 13 March 2019 Presentation

Presentation

Fabrication and characterization of high-voltage AlGaN/GaN HEMTs on silicon substrates (Conference Presentation)

Anna Szerling, Marek Ekielski, Maciej Kozubal, Karolina Pagowska, Andrzej Taube, Marek Guziewicz, Maciej Kaminski, Kamil Kosiel, Krystyna Golaszewska-Malec, Renata Kruszka, Iwona Sankowska, Anna Piotrowska, Joanna Zdunek, Boguslawa Adamczyk-Cieślak

Proceedings Volume 10918, 1091818 (2019) https://doi.org/10.1117/12.2510415

KEYWORDS: Field effect transistors, Silicon, Etching, Plasma treatment, Transistors, Switching, Transmission electron microscopy, Ion implantation, Oxides, Argon

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Proceedings Article | 8 March 2019 Presentation

Presentation

AlGaAs/GaAs terahertz quantum cascade lasers with copper waveguides (Conference Presentation)

Anna Szerling, Kamil Kosiel, Piotr Prokaryn, Renata Kruszka, Jacek Ratajczak, Krystyna Golaszewska-Malec, Maciej Sakowicz, Zbig Wasilewski, Michał Szymański, Maciej Kuc, Tomasz Czyszanowski, Mehtap Özdemir Köklü, Gülnur Aygün, Lütfi Özyüzer, Norbert Pałka

Proceedings Volume 10926, 109261I (2019) https://doi.org/10.1117/12.2510489

KEYWORDS: Quantum cascade lasers, Waveguides, Copper, Gold, Terahertz radiation, Cladding, Diffusion, Semiconductors, Semiconductor lasers, Laser induced damage

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SPIE Journal Paper | 25 April 2017

Al_0.45Ga_0.55As/GaAs-based single-mode distributed-feedback quantum-cascade lasers with surface gratings

Anna Szerling, Renata Kruszka, Kamil Kosiel, Marek Wzorek, Krystyna Gołaszewska, Artur Trajnerowicz, Piotr Karbownik, Maciej Kuc, Tomasz Czyszanowski, Michał Walczakowski, Norbert Pałka

JNP, Vol. 11, Issue 02, 026004, (April 2017) https://doi.org/10.1117/12.10.1117/1.JNP.11.026004

KEYWORDS: Quantum cascade lasers, Gallium arsenide, Etching, Gallium, Reactive ion etching, Aluminum, Argon, Fiber Bragg gratings, Photoresist materials, Waveguides

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Proceedings Article | 20 February 2017 Presentation + Paper

Presentation + Paper

Al0.45Ga0.55As/GaAs-based single-mode distributed-feedback quantum-cascade lasers with surface gratings

Anna Szerling, Renata Kruszka, Kamil Kosiel, Marek Wzorek, Krystyna Gołaszewska, Artur Trajnerowicz, Piotr Karbownik, Maciej Kuc, Tomasz Czyszanowski, Michał Walczakowski, Norbert Palka

Proceedings Volume 10123, 101231M (2017) https://doi.org/10.1117/12.2252791

KEYWORDS: Quantum cascade lasers, Waveguides, Gold, Plasma etching, Mid-IR, Cladding, Waveguide lasers, Deep ultraviolet, Optical lithography, Etching, Gallium arsenide, Reactive ion etching, Fiber Bragg gratings, Silicon, Photoresist materials, Argon

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SPIE Journal Paper | 24 March 2015

Processing of AlGaAs/GaAs quantum-cascade structures for terahertz laser

Anna Szerling, Kamil Kosiel, Michal Szymanski, Zbig Wasilewski, Krystyna Golaszewska, Adam Laszcz, Mariusz Pluska, Artur Trajnerowicz, Maciej Sakowicz, Michal Walczakowski, Norbert Palka, Rafal Jakiela, Anna Piotrowska

JNP, Vol. 9, Issue 01, 093079, (March 2015) https://doi.org/10.1117/12.10.1117/1.JNP.9.093079

KEYWORDS: Metals, Cladding, Gold, Terahertz radiation, Quantum cascade lasers, Waveguides, Gallium arsenide, Semiconducting wafers, Copper, Laser processing

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Proceedings Article | 27 February 2015 Paper

Paper

High-contrast grating reflectors for 980 nm vertical-cavity surface-emitting lasers

M. Gebski, O. Kuzior, M. Wasiak, A. Szerling, A. Wójcik-Jedlińska, N. Pałka, M. Dems, Y. Xie, Z. Xu, Q. Wang, D. Zhang, T. Czyszanowski

Proceedings Volume 9372, 937206 (2015) https://doi.org/10.1117/12.2080989

KEYWORDS: Reflectivity, Refractive index, Vertical cavity surface emitting lasers, Gallium arsenide, Reflectors, Polarization, Mirrors, Tolerancing, Solids, Interfaces

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Proceedings Article | 5 September 2014 Paper

Paper

Processing of AlGaAs/GaAs QC structures for terahertz laser

A. Szerling, K. Kosiel, M. Szymański, Z. Wasilewski, K. Gołaszewska, A. Łaszcz, M. Płuska, A. Trajnerowicz, M. Sakowicz, M. Walczakowski, N. Pałka, R. Jakieła, A. Piotrowska

Proceedings Volume 9199, 919903 (2014) https://doi.org/10.1117/12.2061997

KEYWORDS: Cladding, Gold, Terahertz radiation, Quantum cascade lasers, Waveguides, Gallium arsenide, Semiconducting wafers, Wafer bonding, Metals, Copper

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Proceedings Article | 22 January 2013 Paper

Paper

Analysis of the spatial distribution of radiation emitted by MIR quantum cascade lasers

Emilia Pruszyńska-Karbownik, Kazimierz Regiński, Bohdan Mroziewicz, Michał Szymański, Piotr Karbownik, Kamil Kosiel, Anna Szerling

Proceedings Volume 8702, 87020E (2013) https://doi.org/10.1117/12.2009971

KEYWORDS: Quantum cascade lasers, Indium, Sensors, Gallium arsenide, Distance measurement, Power supplies, Mirrors, Temperature metrology, CCD cameras, Helium neon lasers

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Proceedings Article | 15 May 2012 Paper

Paper

Electrical and optical characterisation of mid-IR GaAs/AlGaAs quantum cascade lasers

Dorota Pierścińska, Kamil Pierściński, Malgorzata Iwińska, Kamil Kosiel, Anna Szerling, Piotr Karbownik, Maciej Bugajski

Proceedings Volume 8432, 84321S (2012) https://doi.org/10.1117/12.922020

KEYWORDS: Quantum cascade lasers, Waveguides, Temperature metrology, Mid-IR, Semiconductor lasers, Laser development, Aluminum, Doping, Gallium arsenide, Transmission electron microscopy

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Proceedings Article | 15 May 2012 Paper

Paper

Experimental analysis of thermal properties of AlGaAs/GaAs quantum cascade lasers

Kamil Pierściński, Dorota Pierścińska, Magorzata Iwińska, Kamil Kosiel, Anna Szerling, Piotr Karbownik, Maciej Bugajski

Proceedings Volume 8432, 84320M (2012) https://doi.org/10.1117/12.922019

KEYWORDS: Quantum cascade lasers, Temperature metrology, Laser beam diagnostics, Copper, Resistance, Reflectivity, Autoregressive models, Gallium arsenide, Modulation, Thermal modeling

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Proceedings Article | 11 May 2012 Paper

Paper

High performance GaAs/AlGaAs quantum cascade lasers: optimization of electrical and thermal properties

Maciej Bugajski, Kamil Kosiel, Anna Szerling, Piotr Karbownik, Kamil Pierściński, Dorota Pierścińska, Grzegorz Hałdaś, Andrzej Kolek

Proceedings Volume 8432, 84320I (2012) https://doi.org/10.1117/12.922007

KEYWORDS: Quantum cascade lasers, Laser development, Laser scattering, Scattering, Doping, Laser damage threshold, Phonons, Pulsed laser operation, Picosecond phenomena, Electroluminescence

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Proceedings Article | 12 October 2005 Paper

Paper

External cavity diode lasers with ridge-waveguide type broad contact semiconductor optical amplifiers

B. Mroziewicz, T. Piwonski, E. Kowalczyk, A. Szerling, S. Lewandowski

Proceedings Volume 5958, 59582J (2005) https://doi.org/10.1117/12.621811

KEYWORDS: Semiconductor lasers, Glasses, Silicon, Diffraction gratings, Holography, Reflectivity, Semiconductor optical amplifiers, Spectrum analysis, Semiconductors, Gallium arsenide

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Showing 5 of 21 publications

Conference Committee Involvement (1)

Quantum Sensing and Nano Electronics and Photonics XXI

26 January 2025 | San Francisco, California, United States

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