Atoosa Dejkameh
Student at Paul Scherrer Institut
SPIE Involvement:
Author
Publications (15)

SPIE Journal Paper | 20 September 2022
JM3, Vol. 21, Issue 03, 034002, (September 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.3.034002
KEYWORDS: Extreme ultraviolet, Diffraction, Photomasks, Image resolution, Microscopes, Reflectivity, Image quality, Nanoimprint lithography, Sensors, High dynamic range imaging

Proceedings Article | 26 May 2022 Paper
Proceedings Volume 12053, 120530H (2022) https://doi.org/10.1117/12.2613337
KEYWORDS: Photomasks, Extreme ultraviolet, Absorption, Inspection, Multilayers, Extreme ultraviolet lithography, Defect detection, Coherence imaging, Material characterization

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11855, 1185506 (2021) https://doi.org/10.1117/12.2601246
KEYWORDS: Photomasks, Extreme ultraviolet, Image quality, High dynamic range imaging, Diffraction, Linear filtering, Sensors, Inspection, Stars, Image resolution

Proceedings Article | 14 September 2021 Presentation + Paper
Proceedings Volume 11875, 118750M (2021) https://doi.org/10.1117/12.2600233
KEYWORDS: Reconstruction algorithms, Extreme ultraviolet, Photomasks, Metrology, Inspection, Computer simulations, Diffraction

Proceedings Article | 12 September 2021 Presentation
Proceedings Volume 11875, 118750J (2021) https://doi.org/10.1117/12.2597060
KEYWORDS: Reconstruction algorithms, Sensors, Diffraction, Detection and tracking algorithms, Signal attenuation, Optics manufacturing, Extreme ultraviolet, Coherence imaging, X-rays, X-ray astronomy

Showing 5 of 15 publications
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