Dr. Bernd Schäfer Profile

Dr. Bernd Schäfer

at Laser Lab Göttingen eV

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Author

Publications (34)

Proceedings Article | 12 July 2019 Open Access

Uniformity and wavefront control of optical filters

Michael Vergöhl, Chris Britze, Stefan Bruns, Andreas Pflug, Jennifer Zimara, Bernd Schäfer, Klaus Mann, Volker Kirschner

Proceedings Volume 11180, 1118046 (2019) https://doi.org/10.1117/12.2536069

KEYWORDS: Coating, Wavefronts, Beam splitters, Reflectivity, Monte Carlo methods, Transmittance, Plasma, Sputter deposition, 3D modeling, Tantalum

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Proceedings Article | 16 May 2019 Paper

Table-top EUV/soft x-ray source for metrological applications

K. Mann, J. Holburg, S. Lange, M. Müller, B. Schäfer

Proceedings Volume 10957, 109571H (2019) https://doi.org/10.1117/12.2515215

KEYWORDS: Plasmas, Extreme ultraviolet, Xenon, Nitrogen, Metrology, Mirrors, Polymethylmethacrylate, Particles, Krypton, Gas lasers

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Proceedings Article | 16 November 2018 Paper

Spectrally resolved wavefront measurements on broad-band dielectric coatings

Klaus Mann, Bernd Schäfer, Jennifer Zimara, Michael Vergöhl, Chris Britze, Stefan Bruns, Volker Kirschner

Proceedings Volume 10805, 108052F (2018) https://doi.org/10.1117/12.2502052

KEYWORDS: Wavefronts, Beam splitters, Dielectrics, Optical coatings, Transmittance, Thin film coatings, Reflectivity, Sensors, Chromatic aberrations, Wavefront sensors

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Proceedings Article | 6 June 2018 Paper

Development of a broadband dielectric beam splitter with reduced spectral wavefront error

Michael Vergöhl, Chris Britze, Stefan Bruns, Jennifer Ahrens, Bernd Schäfer, Klaus Mann, Volker Kirschner

Proceedings Volume 10691, 1069118 (2018) https://doi.org/10.1117/12.2313668

KEYWORDS: Coating, Wavefronts, Beam splitters, Dielectrics, Reflectivity, Transmittance, Tantalum, Sputter deposition, Sensors, Refractive index

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Proceedings Article | 20 March 2018 Presentation

Characterization of absorptance and thermally induced wavefront deformations in DUV lithography optics (Conference Presentation)

Klaus Mann, Uwe Leinhos, Bernd Schäfer

Proceedings Volume 10587, 1058711 (2018) https://doi.org/10.1117/12.2300523

KEYWORDS: Wavefronts, Adaptive optics, Lithography, Absorption, Deep ultraviolet, Thermography, Wafer-level optics, Optical components, Wavefront sensors, Image resolution

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Proceedings Article | 21 November 2017 Paper

Quantitative absorption data from thermally induced wavefront distortions on UV, Vis, and NIR optics

Klaus Mann, Bernd Schäfer, Uwe Leinhos, Maik Lübbecke

Proceedings Volume 10447, 104471W (2017) https://doi.org/10.1117/12.2282366

KEYWORDS: Adaptive optics, Thermography, Laser beam diagnostics, Optical testing, Antireflective coatings

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Proceedings Article | 23 November 2015 Paper

Measurement and compensation of wavefront deformations and focal shifts in high-power laser optics

K. Mann, B. Schäfer, M. Stubenvoll, K. Hentschel, M. Zenz

Proceedings Volume 9632, 96321D (2015) https://doi.org/10.1117/12.2196160

KEYWORDS: Absorption, Thermography, High power lasers, Adaptive optics, Thermal effects, Wavefronts, Silica, Objectives, Mirrors, Wavefront distortions

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Proceedings Article | 22 September 2015 Paper

Wigner distribution measurement of the spatial coherence properties of FELs

Tobias Mey, Bernd Schäfer, Klaus Mann, Barbara Keitel, Elke Plönjes, Marion Kuhlmann

Proceedings Volume 9589, 95890Q (2015) https://doi.org/10.1117/12.2190095

KEYWORDS: Free electron lasers, Spatial coherence, Wigner distribution functions, Coherence imaging, Coherence (optics), Diffraction, Fourier transforms, Americium, Near field, CCD cameras

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Proceedings Article | 15 November 2013 Paper

Photothermal absorption measurements for improved thermal stability of high-power laser optics

M. Stubenvoll, B. Schäfer, K. Mann, A. Walter, L. Zittel

Proceedings Volume 8885, 88851R (2013) https://doi.org/10.1117/12.2031705

KEYWORDS: Absorption, Coating, Wavefronts, Antireflective coatings, Silica, Lenses, Glasses, Wavefront distortions, Adaptive optics, Laser beam diagnostics

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Proceedings Article | 3 May 2013 Paper

Beam characterization of FLASH from beam profile measurement by intensity transport equation and reconstruction of the Wigner distribution function

Bernd Schäfer, Tobias Mey, Klaus Mann, Barbara Keitel, Svea Kreis, Marion Kuhlmann, Elke Plönjes, Kai Tiedtke

Proceedings Volume 8778, 877810 (2013) https://doi.org/10.1117/12.2016975

KEYWORDS: Wavefronts, Free electron lasers, Mirrors, Wigner distribution functions, Wave propagation, Beam propagation method, Optical testing, Wavefront reconstruction, Spatial coherence, Fourier transforms

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Proceedings Article | 3 May 2013 Paper

Hartmann wavefront measurements at FLASH

Barbara Keitel, Bernhard Flöter, Svea Kreis, Marion Kuhlmann, Klaus Mann, Tobias Mey, Elke Plönjes, Bernd Schäfer, Kai Tiedtke

Proceedings Volume 8778, 877814 (2013) https://doi.org/10.1117/12.2020850

KEYWORDS: Wavefronts, Mirrors, Sensors, Free electron lasers, X-rays, Alignment procedures, Beam propagation method, Wavefront sensors, Monochromatic aberrations, Wave propagation

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Proceedings Article | 3 May 2013 Paper

Measurement of wavefront and Wigner distribution function for optics alignment and full beam characterization of FELs

Tobias Mey, Bernd Schäfer, Klaus Mann, Barbara Keitel, Svea Kreis, Marion Kuhlmann, Elke Plönjes, Kai Tiedtke

Proceedings Volume 8778, 87780H (2013) https://doi.org/10.1117/12.2016973

KEYWORDS: Wigner distribution functions, Free electron lasers, Gaussian beams, Extreme ultraviolet, Mirrors, Beam propagation method, Wavefronts, Spatial coherence, Sensors, Fourier transforms

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Proceedings Article | 1 April 2013 Paper

Hartmann wavefront sensor for EUV radiation

K. Mann, B. Flöter, T. Mey, B. Schäfer, B. Keitel, E. Plönjes, K. Tiedtke

Proceedings Volume 8679, 867922 (2013) https://doi.org/10.1117/12.2011508

KEYWORDS: Wavefronts, Extreme ultraviolet, Free electron lasers, Sensors, Mirrors, Wavefront sensors, EUV optics, Monochromatic aberrations, Extreme ultraviolet lithography, Wave propagation

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Proceedings Article | 4 December 2012 Paper

Separation of different loss channels in DUV optical elements

Klaus Mann, Uwe Leinhos, Julian Sudradjat, Bernd Schäfer

Proceedings Volume 8530, 85301K (2012) https://doi.org/10.1117/12.977880

KEYWORDS: Absorption, Wavefronts, Silica, Deep ultraviolet, Thermal effects, Adaptive optics, Excimer lasers, Quartz, Optical components, Calibration

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Proceedings Article | 28 November 2011 Paper

Absolute measurement of absorptance in DUV optics from laser-induced wavefront deformations

K. Mann, U. Leinhos, J. Sudradjat, B. Schäfer

Proceedings Volume 8190, 81901S (2011) https://doi.org/10.1117/12.899503

KEYWORDS: Absorption, Wavefronts, Deep ultraviolet, Laser optics, Adaptive optics, Silica, Refractive index, Calibration, Collimation, Laser beam diagnostics

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Proceedings Article | 21 May 2011 Paper

Beam characterization of FLASH from Hartmann data and measurement of the Wigner distribution function

Bernd Schäfer, Bernhard Flöter, Klaus Mann, Barbara Keitel, Elke Plönjes, Kai Tiedtke

Proceedings Volume 8078, 80780K (2011) https://doi.org/10.1117/12.886107

KEYWORDS: Sensors, Wavefronts, Free electron lasers, Wavefront aberrations, Extreme ultraviolet, Mirrors, Wavefront sensors, CCD image sensors, Wigner distribution functions, Wave propagation

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Proceedings Article | 23 March 2011 Paper

Measurement of wavefront distortions in DUV optics due to lens heating

K. Mann, A. Bayer, U. Leinhos, M. Schöneck, B. Schäfer

Proceedings Volume 7973, 79732B (2011) https://doi.org/10.1117/12.879806

KEYWORDS: Absorption, Wavefronts, Deep ultraviolet, Silica, Wavefront distortions, Thermal effects, Sensors, Semiconductor lasers, Refractive index, Calibration

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Proceedings Article | 17 June 2009 Paper

Photothermal measurement of absorptance losses, temperature-induced wavefront deformation, and compaction in DUV optics

Bernd Schäfer, Bernhard Flöter, Klaus Mann

Proceedings Volume 7389, 73891D (2009) https://doi.org/10.1117/12.827501

KEYWORDS: Wavefronts, Absorption, Quartz, Calibration, Adaptive optics, Wavefront distortions, Silica, Sensors, Resistors, Laser development

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Proceedings Article | 25 February 2009 Paper

Comprehensive laser beam characterization for applications in material processing

Klaus Mann, Armin Bayer, Maik Lübbecke, Bernd Schäfer

Proceedings Volume 7202, 72020C (2009) https://doi.org/10.1117/12.810515

KEYWORDS: Wavefronts, Standards development, Near field, Excimer lasers, Wave propagation, Laser beam propagation, Sensors, Laser beam characterization, Diagnostics, Cameras

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Proceedings Article | 30 December 2008 Paper

Photothermal measurement of absorption and wavefront deformations in fused silica

K. Mann, A. Bayer, J. Gloger, U. Leinhos, T. Rousseau, B. Schäfer

Proceedings Volume 7132, 71321F (2008) https://doi.org/10.1117/12.804565

KEYWORDS: Absorption, Wavefronts, Silica, Quartz, Wavefront distortions, Thermal effects, Deep ultraviolet, Adaptive optics, Excimer lasers, Wavefront sensors

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Proceedings Article | 7 March 2008 Paper

A novel photo-thermal setup for determination of absorptance losses and wavefront deformations in DUV optics

K. Mann, A. Bayer, U. Leinhos, T. Miege, B. Schäfer

Proceedings Volume 6924, 69242P (2008) https://doi.org/10.1117/12.775453

KEYWORDS: Absorption, Wavefronts, Deep ultraviolet, Thermal effects, Wavefront distortions, Quartz, Adaptive optics, Silica, Refractive index, Calibration

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Proceedings Article | 14 February 2008 Paper

Characterization of absorptance losses in optical materials using a high resolution Hartmann-Shack wavefront sensor

A. Bayer, F. Barkusky, U. Leinhos, T. Miege, B. Schäfer, K. Mann

Proceedings Volume 6879, 68791S (2008) https://doi.org/10.1117/12.762579

KEYWORDS: Absorption, Wavefronts, Thermal effects, Wavefront distortions, Quartz, Wavefront sensors, Deep ultraviolet, Adaptive optics, Silica, Refractive index

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Proceedings Article | 18 December 2007 Paper

A novel photo-thermal setup for evaluation of absorptance losses and thermal wavefront deformations in DUV optics

K. Mann, A. Bayer, T. Miege, U. Leinhos, B. Schäfer

Proceedings Volume 6720, 67201B (2007) https://doi.org/10.1117/12.776945

KEYWORDS: Absorption, Wavefronts, Adaptive optics, Deep ultraviolet, Thermal effects, Wavefront distortions, Quartz, Thermography, Silica, Optical testing

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Proceedings Article | 8 February 2007 Paper

Accuracy of laser beam parameters and beam propagation from real-time Hartmann-Shack experiments

Bernd Schäfer, Klaus Mann

Proceedings Volume 6452, 645206 (2007) https://doi.org/10.1117/12.700029

KEYWORDS: Wavefronts, Sensors, Standards development, Neodymium, Laser beam propagation, Beam propagation method, Wave propagation, Optical testing, Helium neon lasers, Wavefront aberrations

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Proceedings Article | 15 January 2007 Paper

Characterization of absorption losses in deep UV optical materials

K. Mann, U. Leinhos, B. Schäfer

Proceedings Volume 6403, 64031J (2007) https://doi.org/10.1117/12.696123

KEYWORDS: Absorption, Crystals, Wavefronts, Deep ultraviolet, Excimer lasers, Thermal effects, Silica, Surface finishing, Surface roughness, Polishing

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Proceedings Article | 8 September 2006 Paper

Propagation of laser beams from Hartmann-Shack measurements

Bernd Schäfer, Maik Lübbecke, Klaus Mann

Proceedings Volume 6343, 634348 (2006) https://doi.org/10.1117/12.707960

KEYWORDS: Wave propagation, Wavefronts, Laser beam propagation, Sensors, Nd:YAG lasers, Excimer lasers, Beam propagation method, Monochromatic aberrations, CCD cameras, Standards development

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Proceedings Article | 31 August 2005 Paper

Characterisation, wavefront reconstruction, and propagation of ultra-broadband laser pulses from Hartmann-Shack measurements

Bernd Schäfer, Klaus Mann, Gerd Marowsky, Christoph Hauri, Jens Biegert, Ursula Keller

Proceedings Volume 5918, 59180P (2005) https://doi.org/10.1117/12.614322

KEYWORDS: Wavefronts, Wave propagation, Sensors, Wavefront reconstruction, Superposition, Wavefront aberrations, Beam propagation method, Laser beam propagation, Terahertz radiation, Argon

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Proceedings Article | 30 May 2003 Paper

Estimation of beam parameters and coherence properties of laser radiation by use of an extended Hartmann-Shack wavefront sensor

Bernd Schaefer, Klaus Mann

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472040

KEYWORDS: Sensors, Standards development, Excimer lasers, Laser beam propagation, Beam analyzers, Wave propagation, Error analysis, Deconvolution, Microlens array, Wavefront sensors

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Proceedings Article | 11 November 2002 Paper

Optical metrology in the VUV and EUV spectral range

Klaus Mann, Sebastian Kranzusch, G. Eckert, Christian Gorling, Uwe Leinhos, Christian Peth, Bernd Schafer

Proceedings Volume 4779, (2002) https://doi.org/10.1117/12.455923

KEYWORDS: Absorption, Fluorine, Photons, Vacuum ultraviolet, Laser induced fluorescence, Solar thermal energy, Thermal effects, Wavefront sensors, Optical metrology, Extreme ultraviolet

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Proceedings Article | 5 September 2002 Paper

Determination of beam parameters and coherence properties of laser radiation using an extended Hartmann-Shack wavefront sensor

Bernd Schaefer, Klaus Mann

Proceedings Volume 4926, (2002) https://doi.org/10.1117/12.481685

KEYWORDS: Wavefront sensors, Silver, Sensors, Wave propagation, Laser beam propagation, Adaptive optics, Unmanned aerial vehicles, Cerium, Picosecond phenomena, Polymethylmethacrylate

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Proceedings Article | 30 July 2002 Paper

Characterization of DUV and VUV optical components

Klaus Mann, G. Eckert, Christian Goerling, Uwe Leinhos, Bernd Schaefer

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474565

KEYWORDS: Absorption, Fluorine, Photons, Optical components, Vacuum ultraviolet, Laser induced fluorescence, Deep ultraviolet, Solar thermal energy, Thermal effects, Wavefront sensors

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Proceedings Article | 1 July 2002 Paper

Development of diagnostic tools for the EUV spectral range

Klaus Mann, Sebastian Kranzusch, G. Eckert, Christian Peth, Bernd Schaefer

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472310

KEYWORDS: Extreme ultraviolet, Xenon, Plasma, Mirrors, Optical filters, Diagnostics, X-rays, EUV optics, Wavefronts, Optical components

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Proceedings Article | 14 September 2001 Paper

Testing of optical components for microlithography at 193-nm and 157-nm

Klaus Mann, Oliver Apel, G. Eckert, Christian Goerling, Uwe Leinhos, Bernd Schaefer

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435671

KEYWORDS: Absorption, Silica, Excimer lasers, Optical components, Ultraviolet radiation, Vacuum ultraviolet, Wavefronts, Optical lithography, Deep ultraviolet, Optical testing

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Proceedings Article | 12 April 2001 Paper

CHARISMA: a new way for angular-resolved scattering measurements

Oliver Apel, Christian Goerling, Uwe Leinhos, Klaus Mann, Bernd Schaefer

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425029

KEYWORDS: Scattering, Light scattering, Sensors, Scatter measurement, Laser scattering, Diffraction, Imaging systems, Reflectivity, Reflection, Calibration

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Showing 5 of 34 publications

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