Dr. Flavio Pardo Profile

Dr. Flavio Pardo

at Lucent Technologies/Bell Labs

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 8 February 2008 Paper

Closed-loop AO demonstration of MEMS SLM with piston, tip and tilt control

Harold Dyson, Flavio Pardo, Roland Ryf, Vladimir Aksyuk, Robert Frahm, Arman Gasparyan, Rick Papazian, David Ramsey, Maria Elina Simon, Susanne Arney

Proceedings Volume 6888, 68880T (2008) https://doi.org/10.1117/12.770432

KEYWORDS: Spatial light modulators, Adaptive optics, Point spread functions, Microelectromechanical systems, Cameras, Control systems, Electronics, Wavefront sensors, Prototyping, Actuators

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Proceedings Article | 15 May 2007 Paper

Two-dimensional MEMS array for maskless lithography and wavefront modulation

D. López, V. Aksyuk, G. Watson, W. Mansfield, R. Cirelli, F. Klemens, F. Pardo, E. Ferry, J. Miner, T. Sorsch, M. Peabody, J. Bower, C. Pai, J. Gates

Proceedings Volume 6589, 65890S (2007) https://doi.org/10.1117/12.724467

KEYWORDS: Microelectromechanical systems, Mirrors, Spatial light modulators, Maskless lithography, Electrodes, Wavefronts, Modulation, Semiconducting wafers, Etching, Resistance

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Proceedings Article | 24 April 2003 Paper

Optical MEMS devices for telecom systems

Flavio Pardo, Vladimir Aksyuk, Susanne Arney, H. Bair, Nagesh Basavanhally, David Bishop, Gregory Bogart, Cristian Bolle, J. Bower, Dustin Carr, H. Chan, Raymond Cirelli, E. Ferry, Robert Frahm, Arman Gasparyan, John Gates, C. Randy Giles, L. Gomez, Suresh Goyal, Dennis Greywall, Martin Haueis, R. Keller, Jungsang Kim, Fred Klemens, Paul Kolodner, Avi Kornblit, T. Kroupenkine, Warren Lai, Victor Lifton, Jian Liu, Yee Low, William Mansfield, Dan Marom, John Miner, David Neilson, Mark Paczkowski, C. Pai, A. Ramirez, David Ramsey, S. Rogers, Roland Ryf, Ronald Scotti, Herbert Shea, M. Simon, H. Soh, Hong Tang, J. Taylor, K. Teffeau, Joseph Vuillemin, J. Weld

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499075

KEYWORDS: Mirrors, Electrodes, Silicon, Microelectromechanical systems, Switches, Reflectors, Semiconducting wafers, Microopto electromechanical systems, Oxides, Optical fabrication equipment

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Proceedings Article | 24 April 2003 Paper

MEMS mirror array for a wavelength-selective 1xK switch

Daniel Lopez, Flavio Pardo, Vladimir Aksyuk, M. Simon, Herbert Shea, Dan Marom, David Neilson, Raymond Cirelli, Fred Klemens, William Mansfield, Linus Fetter, E. Bower, John Miner, T. Sorsch

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.504381

KEYWORDS: Mirrors, Microelectromechanical systems, Switches, Micromirrors, Actuators, Electrodes, Signal attenuation, Wavelength division multiplexing, Metals, Tunable filters

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Proceedings Article | 2 October 2001 Paper

Design for reliability of MEMS/MOEMS for lightwave telecommunications

Susanne Arney, Vladimir Aksyuk, David Bishop, Cristian Bolle, Robert Frahm, Arman Gasparyan, C. Randy Giles, Suresh Goyal, Flavio Pardo, Herbert Shea, Michael Lin, Carolyn White

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442996

KEYWORDS: Microopto electromechanical systems, Reliability, Microelectromechanical systems, Packaging, Telecommunications, Networks, Silicon, Physics, Mechanical engineering, Feedback loops

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Proceedings Article | 25 August 2000 Paper

MEMS/MOEMS for lightwave networks: Can little machines make it big?

David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, Jim Walker

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396433

Proceedings Article | 22 August 2000 Paper

Lucent Microstar micromirror array technology for large optical crossconnects

Vladimir Aksyuk, Flavio Pardo, Cristian Bolle, Susanne Arney, C. Randy Giles, David Bishop

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396503

KEYWORDS: Mirrors, Electrodes, Reflectors, Micromirrors, Silicon, Singular optics, Single mode fibers, Switching, Free space, Free space optics

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Proceedings Article | 22 August 2000 Paper

MEMS/MOEMS for lightwave networks: Can little machines make it big?

David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, Jim Walker

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396490

KEYWORDS: Microelectromechanical systems, Silicon, Mirrors, Optical switching, Attenuators, Multiplexers, Etching, Active optics, Anisotropic etching, Microopto electromechanical systems

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Proceedings Article | 18 August 2000 Paper

MEMS/MOEMS for lightwave networks: Can little machines make it big?

David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, Jim Walker

Proceedings Volume 4179, (2000) https://doi.org/10.1117/12.395689

KEYWORDS: Microelectromechanical systems, Silicon, Mirrors, Optical switching, Attenuators, Multiplexers, Etching, Active optics, Anisotropic etching, Micromirrors

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Proceedings Article | 18 August 2000 Paper

MEMS/MOEMS for lightwave networks: Can little machines make it big?

David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, James Walker

Proceedings Volume 4177, (2000) https://doi.org/10.1117/12.395656

KEYWORDS: Silicon, Microfluidics, Industrial chemicals, Optical communications, Optical switching, Attenuators, Multiplexers, Active optics, Transmitters

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Proceedings Article | 15 August 2000 Paper

MEMS/MOEMS for lightwave networks: Can little machines make it big?

David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, James Walker

Proceedings Volume 4176, (2000) https://doi.org/10.1117/12.395629

KEYWORDS: Microelectromechanical systems, Silicon, Mirrors, Optical switching, Attenuators, Multiplexers, Active optics, Etching, Anisotropic etching, Micromirrors

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Proceedings Article | 11 August 2000 Paper

MEMS/MOEMS for lightwave networks: Can little machines make it big?

David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, James Walker

Proceedings Volume 4175, (2000) https://doi.org/10.1117/12.395606

KEYWORDS: Microelectromechanical systems, Silicon, Mirrors, Optical switching, Attenuators, Multiplexers, Etching, Active optics, Anisotropic etching, Micromirrors

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Proceedings Article | 10 August 2000 Paper

MEMS/MOEMS for lightwave networks: Can little machines make it big?

David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, Jim Walker

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395704

KEYWORDS: Microelectromechanical systems, Silicon, Mirrors, Optical switching, Attenuators, Multiplexers, Etching, Active optics, Anisotropic etching, Micromirrors

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Proceedings Article | 10 August 2000 Paper

Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures

Carolyn White, Herbert Shea, Kimberly Cameron, Flavio Pardo, Cristian Bolle, Vladimir Aksyuk, Susanne Arney

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395697

KEYWORDS: Resistance, Microelectromechanical systems, Reliability, Humidity, Environmental sensing, Environmental monitoring, Thin films, Electrical breakdown, Electrical phenomena, Semiconducting wafers

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Proceedings Article | 10 March 1999 Paper

Stress-induced curvature engineering in surface-micromachined devices

Vladimir Aksyuk, Flavio Pardo, David Bishop

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341167

KEYWORDS: Chromium, Metals, Gold, Reflectors, Mirrors, Temperature metrology, Oxides, Actuators, Beam shaping, Data modeling

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Showing 5 of 15 publications

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