Dr. Hanmeng Li
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 December 2024 Paper
Proceedings Volume 13499, 134990I (2024) https://doi.org/10.1117/12.3046706
KEYWORDS: Silicon, Tolerancing, Silicon nitride, Optical gratings, Manufacturing, Design, Teeth, Silicon photonics, Optical alignment, Etching

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