Mr. Matthew Sagianis Profile

Matthew Sagianis

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Publications (2)

Proceedings Article | 25 May 2022 Presentation + Paper

Study of surface interactions for encapsulation of phase change memory materials

L. Buzi, D. Koty, M. Hopstaken, J. Bruley, L. Gignac, M. Sagianis, D. Farmer, H. Miyazoe, A. Mosden, S. Engelmann, R. Bruce

Proceedings Volume 12056, 1205609 (2022) https://doi.org/10.1117/12.2614303

KEYWORDS: Plasma, Etching, Plasma enhanced chemical vapor deposition, Oxygen, Argon, Refractive index, Hydrogen, FT-IR spectroscopy, Wet etching

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Proceedings Article | 22 February 2021 Presentation + Paper

Process trace analytics for process development

Robert Baseman, Fateh Tipu, Sebastian Englemann, John Papalia, Matthew Sagianis, Scott DeVries, Danielle Durrant, Sebastian Naczas, Vinay Pai, Shanti Pancharatnam

Proceedings Volume 11615, 116150J (2021) https://doi.org/10.1117/12.2583645

KEYWORDS: Analytics, Data processing, Sensors, Semiconducting wafers, Process control, Manufacturing, Time metrology, Statistical analysis, Semiconductor manufacturing, Metrology

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