Dr. Mehdi Daneshpanah Profile

Dr. Mehdi Daneshpanah

Sr. Director of Engineering at KLA Corp

SPIE Involvement:

Author

Area of Expertise:

Three dimensional sensing , Digital Holography , Medical imaging , Biophotonics , Display and visualization , Optical Metrology

Profile Summary

♦ Driven R&D and product development programs in semiconductor inspection and high-tech manufacturing industries with focus on systems architecture, algorithms and software.
♦ Extensive work in the area of new algorithm development and optimization for computational-optical systems. Hands on experience with 3D and high precision optical imaging / metrology systems.
♦ Experienced in system level design for highly complex computational-optical inspection tools for N10 and below.
♦ 50+ publications w/ h-index 14

Specialties: imaging system architecuture, algorithm design, mathematical and statistical modeling, optimization, advanced optical imaging, computational lithography, 3D optical imaging/display systems, digital holography, computational optics for 3D sensing, nonlinear microscopy, statistical data analysis and pattern recognition

Publications (18)

Proceedings Article | 16 October 2017 Paper

Paper

Process window discovery from mask inspection for hotspot analysis and verification

James Cheng, William Chou, C. Twu, Hsin-Fu Chou, Jackie Cheng, Colbert Lu, Heng-Jen Lee, Bosheng Zhang, Mehdi Daneshpanah, Apo Sezginer, David Wu, Mike Yeh, Albert Chien

Proceedings Volume 10451, 104510X (2017) https://doi.org/10.1117/12.2281215

KEYWORDS: Photomasks, Inspection, Scanning electron microscopy, Lithography, 3D modeling, Near field, Photoresist materials, Semiconducting wafers

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Proceedings Article | 23 October 2015 Paper

Paper

Accurate mask registration on tilted lines for 6F2 DRAM manufacturing

K. D. Roeth, W. Choi, Y. Lee, S. Kim, D. Yim, F. Laske, M. Ferber, M. Daneshpanah, E. Kwon

Proceedings Volume 9635, 963506 (2015) https://doi.org/10.1117/12.2202818

KEYWORDS: Photomasks, Overlay metrology, Reticles, Semiconducting wafers, Metrology, Image registration, Manufacturing, Ions, Scanners, Error analysis

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Proceedings Article | 9 July 2015 Paper

Paper

Investigation of local registration performance of IMS Nanofabrication’s Multi-Beam Mask Writer

Daniel Chalom, Jan Klikovits, David Geist, Peter Hudek, Stefan Eder-Kapl, Mehdi Daneshpanah, Frank Laske, Stefan Eyring, Klaus-Dieter Roeth

Proceedings Volume 9658, 965805 (2015) https://doi.org/10.1117/12.2196388

KEYWORDS: Photomasks, Metrology, Image registration, Nanofabrication, Calibration, Reticles, Beam shaping, Manufacturing, Lithography, Model-based design

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Proceedings Article | 28 July 2014 Paper

Paper

Proximity corrected accurate in-die registration metrology

M. Daneshpanah, F. Laske, M. Wagner, K.-D. Roeth, S. Czerkas, H. Yamaguchi, N. Fujii, S. Yoshikawa, K. Kanno, H. Takamizawa

Proceedings Volume 9256, 92560F (2014) https://doi.org/10.1117/12.2072074

KEYWORDS: Photomasks, Metrology, Semiconducting wafers, Model-based design, Near field optics, Reticles, Autoregressive models, Overlay metrology, Systems modeling, Logic

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Proceedings Article | 28 July 2014 Paper

Paper

In-die registration measurement using novel model-based approach for advanced technology masks

Shunsuke Sato, Frank Laske, Shinji Kunitani, Tatsuhiko Kamibayashi, Akira Fuse, Naoki Takahashi, Klaus-Dieter Roeth, Slawomir Czerkas, Mehdi Daneshpanah, Yoshinori Nagaoka

Proceedings Volume 9256, 92560E (2014) https://doi.org/10.1117/12.2070399

KEYWORDS: Photomasks, Image registration, Model-based design, Semiconducting wafers, Overlay metrology, Data modeling, Metrology, Semiconductors, Data processing, Metals

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Proceedings Article | 28 May 2014 Paper

Paper

Improved measurement dynamic range for point triangulation probes

Kevin Harding, Mehdi Daneshpanah, Guangping Xie, Li Tao

Proceedings Volume 9110, 911006 (2014) https://doi.org/10.1117/12.2051171

KEYWORDS: Sensors, Speckle, Phase shifts, Optical metrology, Laser metrology, Imaging systems, Metals, Ions, Neodymium, Acquisition tracking and pointing

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Proceedings Article | 2 April 2014 Paper

Paper

Mask contribution to intra-field wafer overlay

William Chou, Hsien-Min Chang, Chao Yin Chen, M. Wagner, K.-D. Roeth, S. Czerkas, M. Ferber, M. Daneshpanah, F. Laske, R. Chiang, S. Klein

Proceedings Volume 9050, 90501Q (2014) https://doi.org/10.1117/12.2049000

KEYWORDS: Photomasks, Semiconducting wafers, Reticles, Overlay metrology, Metrology, Logic, Data modeling, Lithography, Process control, Ions

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Proceedings Article | 16 September 2013 Paper

Paper

In-die mask registration for multi-patterning

F. Laske, S. Kunitani, T. Kamibayashi, M. Yamana, A. Fuse, M. Wagner, K.-D. Roeth, M. Ferber, M. Daneshpanah, S. Czerkas, H. Sakaguchi

Proceedings Volume 8880, 888024 (2013) https://doi.org/10.1117/12.2027200

KEYWORDS: Photomasks, Semiconducting wafers, Metrology, Reticles, Image registration, Overlay metrology, Model-based design, Manufacturing, Lithography, Error analysis

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Proceedings Article | 14 September 2011 Paper

Paper

Surface sensitivity reduction in laser triangulation sensors

Mehdi Daneshpanah, Kevin Harding

Proceedings Volume 8133, 81330O (2011) https://doi.org/10.1117/12.893893

KEYWORDS: Sensors, Speckle, Beam shaping, Detector arrays, Spatial light modulators, Distance measurement, Reflection, Semiconductor lasers, Backscatter, Beam splitters

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Proceedings Article | 20 May 2011 Paper

Paper

Application issues in the use of depth from (de)focus analysis methods

M. Daneshpanah, G. Abramovich, K. Harding, A. Vemury

Proceedings Volume 8043, 80430G (2011) https://doi.org/10.1117/12.886271

KEYWORDS: Imaging systems, Point spread functions, Image analysis, Convolution, Sensors, 3D image processing, 3D modeling, Stereoscopy, Analytical research, 3D metrology

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Proceedings Article | 20 May 2011 Paper

Paper

3D integral imaging with unknown sensor positions

Xiao Xiao, Mehdi Daneshpanah, Myungjin Cho, Bahram Javidi

Proceedings Volume 8043, 804309 (2011) https://doi.org/10.1117/12.884283

KEYWORDS: Sensors, Integral imaging, Cameras, 3D image processing, Image sensors, 3D image reconstruction, Calibration, 3D metrology, 3D modeling, Reconstruction algorithms

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Proceedings Article | 24 August 2010 Paper

Paper

Detection, identification and tracking of biological micro/nano organisms by computational 3D optical imaging

Bahram Javidi, Inkyu Moon, Mehdi Daneshpanah

Proceedings Volume 7759, 77590R (2010) https://doi.org/10.1117/12.861490

KEYWORDS: Digital holography, Holograms, Microorganisms, Holography, 3D image reconstruction, Image segmentation, 3D image processing, Detection and tracking algorithms, Digital recording, Microscopy

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Proceedings Article | 5 May 2010 Paper

Paper

Axially distributed 3D imaging and reconstruction

Mehdi Daneshpanah, Robert Schulein, Bahram Javidi

Proceedings Volume 7690, 76900P (2010) https://doi.org/10.1117/12.853471

KEYWORDS: Imaging systems, Stereoscopy, 3D image processing, Sensors, 3D surface sensing, 3D acquisition, Visualization, 3D image reconstruction, Sensing systems, 3D displays

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Proceedings Article | 5 May 2009 Open Access

Open Access

Paper

3D multi-view passive sensing and visualization using randomly distributed sensors

Bahram Javidi, Mehdi DaneshPanah

Proceedings Volume 7335, 73350A (2009) https://doi.org/10.1117/12.822708

KEYWORDS: Sensors, 3D image processing, Imaging systems, 3D acquisition, Automatic target recognition, Stereoscopy, 3D displays, Visualization, Integral imaging, 3D modeling

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Proceedings Article | 14 April 2008 Open Access

Open Access

Paper

New paradigms for active and passive 3D remote object sensing, visualization, and recognition

P. McManamon, B. Javidi, E. Watson, M. DaneshPanah, R. Schulein

Proceedings Volume 6967, 69670E (2008) https://doi.org/10.1117/12.778343

KEYWORDS: 3D image processing, Sensors, 3D image reconstruction, Nonlinear filtering, LIDAR, 3D acquisition, Imaging systems, Automatic target recognition, Integral imaging, Image processing

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Proceedings Article | 26 September 2007 Paper

Paper

Three-dimensional tracking of objects in holographic imaging

Mehdi DaneshPanah, Bahram Javidi

Proceedings Volume 6778, 67780N (2007) https://doi.org/10.1117/12.752618

KEYWORDS: Microorganisms, Holograms, Holography, Digital holography, 3D image processing, 3D acquisition, Microscopy, Interfaces, Detection and tracking algorithms, Data modeling

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Proceedings Article | 26 September 2007 Paper

Paper

Analysis of synthetic aperture integral imaging

Behnoosh Tavakoli, Mehdi DaneshPanah, Bahram Javidi, Edward Watson

Proceedings Volume 6778, 67780O (2007) https://doi.org/10.1117/12.752621

KEYWORDS: Sensors, Image sensors, Integral imaging, Synthetic aperture radar, 3D image processing, Cameras, Error analysis, Monte Carlo methods, 3D image reconstruction, Image resolution

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Proceedings Article | 17 October 2006 Open Access

Open Access

Paper

3D imaging, visualization, and recognition of biological micro-organisms

Bahram Javidi, Inkyu Moon, Mehdi Daneshpanah

Proceedings Volume 6392, 639202 (2006) https://doi.org/10.1117/12.694417

KEYWORDS: Microorganisms, Image segmentation, Digital holography, Holograms, 3D image processing, 3D image reconstruction, Holography, Microscopy, Detection and tracking algorithms, Statistical analysis

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Showing 5 of 18 publications

Conference Committee Involvement (3)

Dimensional Optical Metrology and Inspection for Practical Applications III

5 May 2014 | Baltimore, MD, United States

Dimensional Optical Metrology and Inspection for Practical Applications II

25 August 2013 | San Diego, California, United States

Dimensional Optical Metrology and Inspection for Practical Applications

22 August 2011 | San Diego, California, United States

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