Michael Friedrich
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 October 2023 Paper
Varvara Brackmann, Malte Neul, Michael Friedrich, Wolfram Langheinrich, Maik Simon, Pascal Muster, Sebastian Pregl, Arne Demmler, Norbert Hanisch, Maximilian Lederer, Katrin Zimmermann, Jan Klos, Felix Reichmann, Yuji Yamamoto, Marcus Wislicenus, Claus Dahl, Lars Schreiber, Hendrik Bluhm, Benjamin Lilienthal-Uhlig
Proceedings Volume 12802, 128020F (2023) https://doi.org/10.1117/12.2675943
KEYWORDS: Quantum spin, Quantum gates, Electrodes, Quantum communications, Electron beam lithography, Etching, Quantum processes, Fabrication, Semiconducting wafers, Silicon

Proceedings Article | 29 August 2019 Paper
Varvara Brackmann, Michael Friedrich, Clyde Browning, Norbert Hanisch, Benjamin Uhlig
Proceedings Volume 11177, 1117713 (2019) https://doi.org/10.1117/12.2534642
KEYWORDS: Point spread functions, Scattering, Scanning electron microscopy, Tolerancing, Critical dimension metrology, Calibration, Electron beam lithography, Electron beams

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