Dr. Siddarth Krishnan Profile

Dr. Siddarth Krishnan

at Applied Materials Inc

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Publications (3)

Proceedings Article | 9 April 2024 Presentation + Paper

Performance comparison of photosensitive polyimides for high-resolution dual-damascene schemes for FOWLP packaging applications

Luisa Bozano, Roger Quon, Ben Briggs, Ryan Ley, Athena Pang, Peng Suo, Prayudi Lianto, Andy Yong, Arvind Sundarrajan, Jorge Fernandez, Niranjan Khasgiwale, C. C. Chuang, Jang Fung Chen, Siddarth Krishnan, Mike Chudzik, Chris Bencher

Proceedings Volume 12957, 129570X (2024) https://doi.org/10.1117/12.3010203

KEYWORDS: Lithography, Packaging, Polyimides, Materials properties, Electrical properties, Dielectrics, Image processing, Film thickness, Chemical mechanical planarization, Advanced packaging

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Proceedings Article | 1 December 1991 Paper

Characterization of microstructure of Si films grown by laser-enhanced photo-CVD using Si2H6

Sean Lian, Burt Fowler, S. Krishnan, Le-Tien Jung, Chien-Yen Li, Sanjay Banerjee

Proceedings Volume 1598, (1991) https://doi.org/10.1117/12.51030

KEYWORDS: Silicon, Crystals, Diffraction, Laser crystals, Excimer lasers, Microelectronics, Photonic crystals, Laser manufacturing, Manufacturing, Transmission electron microscopy

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Proceedings Article | 1 December 1991 Paper

Modeling of photochemical vapor deposition of epitaxial silicon using an ArF excimer laser

Burt Fowler, Sean Lian, S. Krishnan, Le-Tien Jung, Chien-Yen Li, Sanjay Banerjee

Proceedings Volume 1598, (1991) https://doi.org/10.1117/12.51031

KEYWORDS: Silicon, Excimer lasers, Molecules, Microelectronics, Diffusion, Semiconductor lasers, Absorption, Chemical reactions, Laser manufacturing, Manufacturing

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