Dr. Vahagn Sargsyan Profile

Dr. Vahagn Sargsyan

at Carl Zeiss SMS

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Publications (2)

Proceedings Article | 16 October 2017 Paper

Automated defect disposition with AIMS AutoAnalysis

Guy Russell, David Jenkins, Arosha Goonesekera, Kay Dornbusch, Vahagn Sargsyan, Hendrik Zachmann, Ute Buttgereit

Proceedings Volume 10451, 1045113 (2017) https://doi.org/10.1117/12.2281884

KEYWORDS: Defect detection, Defect inspection, Critical dimension metrology, Image analysis, Image processing, Statistical analysis, Tolerancing, Photomasks, Manufacturing, Reliability

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Proceedings Article | 28 June 2013 Paper

A method of utilizing AIMS to quantify substrate/attenuator over-etch or under-etch during mask repair

Vahagn Sargsyan, Kevin Olson, Doug Uzzel, Jon Morgan, Mark Ma, Gilles Tabbone, Anthony Garetto

Proceedings Volume 8701, 870109 (2013) https://doi.org/10.1117/12.2027883

KEYWORDS: Etching, Quartz, Analytical research, Critical dimension metrology, Process control, Attenuators, Atomic force microscopy, Photomasks, Opacity, Image processing

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