PROCEEDINGS VOLUME 6882
MOEMS-MEMS 2008 MICRO AND NANOFABRICATION | 19-24 JANUARY 2008
Micromachining and Microfabrication Process Technology XIII
Editor Affiliations +
IN THIS VOLUME

5 Sessions, 17 Papers, 0 Presentations, 0 Posters
Bio-devices  (1)
Proceedings Volume 6882 is from: Logo
MOEMS-MEMS 2008 MICRO AND NANOFABRICATION
19-24 January 2008
San Jose, California, United States
Front Matter: Volume 6882
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 688201 (2008) https://doi.org/10.1117/12.791926
Bio-devices
M. P. C. Watts, N. Cramer, R. Sebra, H. Simms, K. Masters, T. Haraldsson, K. Anseth, C. Bowman
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 688203 (2008) https://doi.org/10.1117/12.758755
MEMS and MOEMS
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 688206 (2008) https://doi.org/10.1117/12.764036
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 688207 (2008) https://doi.org/10.1117/12.763542
M. Oldsen, U. Hofmann, H. J. Quenzer, J. Janes, C. Stolte, K. Gruber, M. Ites, F. Sörensen, B. Wagner
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 688208 (2008) https://doi.org/10.1117/12.760941
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 688209 (2008) https://doi.org/10.1117/12.762358
T. El Mastouli, J.P. Laur, J.L. Sanchez, M. Brunet, D. Bourrier, M. Dilhan
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820A (2008) https://doi.org/10.1117/12.763085
M. E. Kiziroglou, A. Goswami Mukherjee, R. W. Moseley, P. Taylor, S. Pranonsatit, A. S. Holmes, E. M. Yeatman
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820B (2008) https://doi.org/10.1117/12.763341
Etching and Lithography
C. N. B. Udalagama, S. F. Chan, S. Homhuan, A. A. Bettiol, T. Wohland, F. Watt
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820D (2008) https://doi.org/10.1117/12.762885
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820E (2008) https://doi.org/10.1117/12.763217
Prem Pal, Kazuo Sato, Miguel A. Gosalvez, Mitsuhiro Shikida
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820F (2008) https://doi.org/10.1117/12.765475
U. Triltsch, S. Büttgenbach
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820G (2008) https://doi.org/10.1117/12.773043
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820H (2008) https://doi.org/10.1117/12.762868
Nitin Uppal, Panos S. Shiakolas, Mohsin Rizwan
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820I (2008) https://doi.org/10.1117/12.763824
Poster Session
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820J (2008) https://doi.org/10.1117/12.761895
Phaninder R. Kanikella, Matthew J. O'Keefe, Chang-Soo Kim
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820L (2008) https://doi.org/10.1117/12.768611
Marta Klanjšek Gunde, Nina Hauptman, Marijan Maček
Proceedings Volume Micromachining and Microfabrication Process Technology XIII, 68820M (2008) https://doi.org/10.1117/12.761618
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