Blandine Minghetti
Principal Apps Engineer at ASML Netherlands BV
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Publications (19)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12956, 1295606 (2024) https://doi.org/10.1117/12.3010477
KEYWORDS: Wafer bonding, Semiconducting wafers, Distortion, Scanners, Silicon, Optical alignment, Deformation, Adhesion, Etching, Metrology

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 1249633 (2023) https://doi.org/10.1117/12.2658296
KEYWORDS: Annealing, Semiconducting wafers, Metrology, Distortion, Overlay metrology, Deformation, Chemical mechanical planarization, Silicon, Optical interferometry, Manufacturing

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124962C (2023) https://doi.org/10.1117/12.2657422
KEYWORDS: Wafer bonding, Semiconducting wafers, Scanners, Silicon, Distortion, Optical alignment, Transistors, Oxides, Crystals, Etching

Proceedings Article | 20 March 2020 Paper
Proceedings Volume 11325, 113251L (2020) https://doi.org/10.1117/12.2552012
KEYWORDS: Overlay metrology, Metrology, Scanners, Critical dimension metrology

Proceedings Article | 24 March 2017 Paper
Pavan Samudrala, Gregory Hart, Yen-Jen Chen, Lokesh Subramany, Haiyong Gao, Nyan Aung, Woong Jae Chung, Blandine Minghetti, Rajan Mali, Seva Khikhlovskyi, Pieter Heres
Proceedings Volume 10147, 101471T (2017) https://doi.org/10.1117/12.2258128
KEYWORDS: Optical alignment, Sensors, Scanners, Aluminum, Near infrared, Laser beam diagnostics

Showing 5 of 19 publications
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