Mr. Daniel J. Bajuk Profile

Daniel J. Bajuk

Consultant

SPIE Involvement:

Author

Publications (3)

SPIE Journal Paper | 11 July 2016

Validation of the corrective optics on the Hubble Space Telescope 1st Servicing Mission

Kevin Thompson, Robert Kestner, J. Michael Rodgers, Daniel Bajuk

JATIS, Vol. 2, Issue 03, 034001, (July 2016) https://doi.org/10.1117/12.10.1117/1.JATIS.2.3.034001

KEYWORDS: Mirrors, Cameras, Monochromatic aberrations, Computer generated holography, Hubble Space Telescope, Space telescopes, Telescopes, Optical design, Interferometers, Astronomical imaging

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Proceedings Article | 17 April 2014 Paper

Projection optics for EUVL micro-field exposure tools with 0.5 NA

Holger Glatzel, Dominic Ashworth, Dan Bajuk, Matt Bjork, Mark Bremer, Mark Cordier, Kevin Cummings, Luc Girard, Michael Goldstein, Eric Gullikson, Samuel Hardy, Russ Hudyma, James Kennon, Robert Kestner, Lou Marchetti, Keyvan Nouri, Patrick Naulleau, Daniel Pierce, Regina Soufli, Eberhard Spiller, Yogesh Verma

Proceedings Volume 9048, 90481K (2014) https://doi.org/10.1117/12.2048643

KEYWORDS: Mirrors, Metrology, Wavefronts, Projection systems, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography, Optical coatings, Lithography, Optical fabrication

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Proceedings Article | 23 November 1999 Paper

Progress in the development of three-aspherical mirror optics for EUVL

Hiroo Kinoshita, Takeo Watanabe, Daniel Bajuk, Jay Daniel, Yachiyo Kimpara, Michael Kriese, Yuriy Platonov

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371114

KEYWORDS: Mirrors, Extreme ultraviolet lithography, Multilayers, Reflectivity, Coating, Surface finishing, Polishing, Phase interferometry, Interferometers, Semiconducting wafers

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