Dr. Heather J. Patrick Profile

Dr. Heather J. Patrick

Physicist at National Institute of Standards and Technology

SPIE Involvement:

Author

Publications (21)

Proceedings Article | 11 October 2016 Paper

Goniometric and hemispherical reflectance and transmittance measurements of fused silica diffusers

Paul Lemaillet, Heather Patrick, Thomas Germer, Leonard Hanssen, B. Carol Johnson, Georgi Georgiev

Proceedings Volume 9961, 996109 (2016) https://doi.org/10.1117/12.2237975

KEYWORDS: IRIS Consortium, Diffusers, Reflectivity, Transmittance, Silica, Scattering, Bidirectional reflectance transmission function, Optical spheres, Sensors, Integrating spheres

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Proceedings Article | 23 September 2013 Paper

The NIST Robotic Optical Scatter Instrument (ROSI) and its application to BRDF measurements of diffuse reflectance standards for remote sensing

Heather Patrick, Clarence Zarobila, Thomas Germer

Proceedings Volume 8866, 886615 (2013) https://doi.org/10.1117/12.2023095

KEYWORDS: Bidirectional reflectance transmission function, Receivers, Sensors, Robotics, Scattering, Reflectivity, Light sources, Polarization, Remote sensing, Standards development

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Proceedings Article | 15 October 2012 Paper

Tunable supercontinuum fiber laser source for BRDF measurements in the STARR II gonioreflectometer

Heather Patrick, Clarence Zarobila, Thomas Germer, Victor Ying, Catherine Cooksey, Benjamin Tsai

Proceedings Volume 8495, 84950K (2012) https://doi.org/10.1117/12.930742

KEYWORDS: Bidirectional reflectance transmission function, Receivers, Polarization, Light sources, Sensors, Reflectivity, Light scattering, Scattering, Optical testing, Silicon

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Proceedings Article | 10 September 2011 Paper

Mueller matrix bidirectional reflectance distribution function measurements and modeling of diffuse reflectance standards

Thomas Germer, Heather Patrick

Proceedings Volume 8160, 81600D (2011) https://doi.org/10.1117/12.892713

KEYWORDS: Scattering, Bidirectional reflectance transmission function, Chemical elements, Light scattering, Radiative transfer, Polarimetry, Rayleigh scattering, Absorption, Reflectivity, Standards development

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Proceedings Article | 27 August 2010 Paper

Supercontinuum fiber laser source for reflectance calibrations in remote sensing

Clarence Zarobila, Heather Patrick

Proceedings Volume 7807, 78070B (2010) https://doi.org/10.1117/12.859923

KEYWORDS: Monochromators, Collimators, Bidirectional reflectance transmission function, Mirrors, Zemax, Calibration, Prototyping, Reflectivity, Sensors, Short wave infrared radiation

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Proceedings Article | 2 April 2010 Paper

Effect of bandwidth and numerical aperture in optical scatterometry

Thomas Germer, Heather Patrick

Proceedings Volume 7638, 76381F (2010) https://doi.org/10.1117/12.846776

KEYWORDS: Scatterometry, Silicon, Binary data, Scatter measurement, Solids, Computer simulations, Integrated optics, Standards development, Metrology, Process control

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Proceedings Article | 23 March 2009 Paper

Developing an uncertainty analysis for optical scatterometry

Thomas Germer, Heather Patrick, Richard Silver, Benjamin Bunday

Proceedings Volume 7272, 72720T (2009) https://doi.org/10.1117/12.814835

KEYWORDS: Scatterometry, Scatter measurement, Optical properties, Photoresist materials, Uncertainty analysis, Spectroscopy, Silicon, Oxides, Error analysis, Data modeling

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Proceedings Article | 18 March 2009 Paper

In situ measurement of annealing-induced line shape evolution in nanoimprinted polymers using scatterometry

Heather Patrick, Thomas Germer, Yifu Ding, Hyun Wook Ro, Lee Richter, Christopher Soles

Proceedings Volume 7271, 727128 (2009) https://doi.org/10.1117/12.815360

KEYWORDS: Scatterometry, Data modeling, Annealing, Polymers, Ellipsometry, Solids, Atomic force microscopy, Nanoimprint lithography, In situ metrology, Statistical modeling

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Proceedings Article | 9 September 2008 Paper

Extraction of trench geometry and linewidth of nanoscale grating targets in (110)-oriented silicon using angle-resolved scatterometry

Heather Patrick, Thomas Germer, Michael Cresswell, Bin Li, Huai Huang, Paul Ho

Proceedings Volume 7042, 70420B (2008) https://doi.org/10.1117/12.796286

KEYWORDS: Scatterometry, Silicon, Reflectivity, Scanning electron microscopy, Scatter measurement, Oxides, Data modeling, Electron beam lithography, Scattering, Crystals

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Proceedings Article | 25 March 2008 Paper

Modeling the effect of finite size gratings on scatterometry measurements

Elizabeth Kenyon, Michael Cresswell, Heather Patrick, Thomas Germer

Proceedings Volume 6922, 69223P (2008) https://doi.org/10.1117/12.772769

KEYWORDS: Diffraction, Reflectivity, Scatterometry, Diffraction gratings, Gaussian beams, Scatter measurement, Metrology, Sensors, Silicon, Optical simulations

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SPIE Journal Paper | 1 January 2008

Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy

Heather Patrick, Ravikiran Attota, Bryan Barnes, Thomas Germer, Ronald Dixson, Michael Stocker, Richard Silver, Michael Bishop

JM3, Vol. 7, Issue 01, 013012, (January 2008) https://doi.org/10.1117/12.10.1117/1.2885275

KEYWORDS: Reflectivity, Diffraction, Silicon, Microscopy, Scanning electron microscopy, Optical testing, Objectives, Atomic force microscopy, Diffraction gratings, Microscopes

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Proceedings Article | 10 September 2007 Paper

Progress toward traceable nanoscale optical critical dimension metrology for semiconductors

Heather Patrick, Thomas Germer

Proceedings Volume 6672, 66720L (2007) https://doi.org/10.1117/12.734080

KEYWORDS: Reflectivity, Scatterometry, Scanning electron microscopy, Data modeling, Semiconductors, Optical testing, Scatter measurement, Polarization, Silicon, Critical dimension metrology

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Proceedings Article | 24 March 2006 Paper

Scatterfield microscopy using back focal plane imaging with an engineered illumination field

Heather Patrick, Ravikiran Attota, Bryan Barnes, Thomas Germer, Michael Stocker, Richard Silver, Michael Bishop

Proceedings Volume 6152, 61520J (2006) https://doi.org/10.1117/12.656452

KEYWORDS: Reflectivity, Diffraction, Silicon, Scatterometry, Polarization, Diffraction gratings, Cameras, Illumination engineering, Data conversion, Microscopes

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Proceedings Article | 24 March 2006 Paper

The limits of image-based optical metrology

R. Silver, B. Barnes, R. Attota, J. Jun, J. Filliben, J. Soto, M. Stocker, P. Lipscomb, E. Marx, H. Patrick, R. Dixson, R. Larrabee

Proceedings Volume 6152, 61520Z (2006) https://doi.org/10.1117/12.660289

KEYWORDS: Overlay metrology, Silicon, Scanning electron microscopy, Polarization, Metrology, Reflectivity, Illumination engineering, Critical dimension metrology, Indium arsenide, Dysprosium

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Proceedings Article | 9 November 2000 Paper

Self-aligning, bipolar bend transducer based on long period grating written in eccentric core fiber

Heather Patrick

Proceedings Volume 4185, 41855P (2000) https://doi.org/10.1117/12.2302348

KEYWORDS: Cladding, Sensors, Signal attenuation, Transducers, Structured optical fibers, Analytical research, Optical inspection, Glasses, Light emitting diodes, Optical filters

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Proceedings Article | 12 June 2000 Paper

Reliability of ultrahigh sensitivity optical fiber sensors embedded in graphite composites

Kevin Uleck, M. Fox, Anthony Vizzini, E. Friebele, Heather Patrick, Barbara Wright, A. Greenblatt, W. Simon

Proceedings Volume 3986, (2000) https://doi.org/10.1117/12.388141

KEYWORDS: Sensors, Composites, Lead, Reliability, Fiber optics sensors, Optical fibers, Adhesives, Manufacturing, Silica, Silicon

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Proceedings Article | 9 December 1999 Paper

Embedding and testing of ultrahigh-sensitivity optical fiber sensors in prototype graphite composite spacecraft strut tubes

E. Friebele, Heather Patrick, Barbara Wright, A. Greenblatt, E. Bolden, W. Simon, Daron Giles, M. Stringfield, G. Hidalgo, Brian Catanzaro, M. Maher, Kevin Uleck, M. Fox, Anthony Vizzini

Proceedings Volume 3860, (1999) https://doi.org/10.1117/12.372998

KEYWORDS: Sensors, Composites, Lead, Fiber optics sensors, Adhesives, Silica, Coating, Optical fibers, Fiber coatings, Fiber Bragg gratings

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Proceedings Article | 26 November 1999 Paper

Long-period fiber gratings: sensors, sources, and beyond

Heather Patrick

Proceedings Volume 3847, (1999) https://doi.org/10.1117/12.371262

KEYWORDS: Sensors, Fiber Bragg gratings, Cladding, Interferometers, Signal attenuation, Temperature metrology, Fiber optics sensors, Optical filters, Wavelength division multiplexing, Ultraviolet radiation

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Proceedings Article | 1 September 1999 Paper

Directional shape sensing using bend sensitivity of long period fiber gratings

Heather Patrick

Proceedings Volume 3746, 37462T (1999) https://doi.org/10.1117/12.2302091

KEYWORDS: Sensors, Fiber optics sensors, Fiber Bragg gratings, Polarization, Metals, Signal attenuation, Calibration, Optics manufacturing, Optical fibers, Shape analysis

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Proceedings Article | 18 June 1998 Paper

Fiber Bragg grating with long-period fiber grating superstructure for simultaneous strain and temperature measurement

Heather Patrick, Sandeep Vohra

Proceedings Volume 3483, (1998) https://doi.org/10.1117/12.309687

KEYWORDS: Sensors, Fiber Bragg gratings, Temperature metrology, Reflection, Calibration, Coating, Signal attenuation, Analytical research, Fiber optics sensors, Phase shift keying

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Proceedings Article | 27 November 1996 Paper

Fiber Bragg grating sensor demodulation system using in-fiber long period grating filters

Heather Patrick, Alan Kersey, J. Pedrazzani, Ashish Vengsarkar

Proceedings Volume 2838, (1996) https://doi.org/10.1117/12.259816

KEYWORDS: Fiber Bragg gratings, Sensors, Optical filters, Demodulation, Linear filtering, Temperature metrology, Actuators, Electronic filtering, Cladding, Structured optical fibers

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Showing 5 of 21 publications

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