Mr. Itai Buks Profile

Itai Buks

at Applied Materials Israel Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 April 2023 Poster

SEM overlay target design using e-beam simulation

Kevin Houchens, Yaniv Abramovitz, Shay Attal, Ofer Adan, Nahum Bomshtein, Itai Buks, Ryan Hsieh, Tal Itzkovich, Jenny Perry

Proceedings Volume 12496, 1249623 (2023) https://doi.org/10.1117/12.2669984

KEYWORDS: Overlay metrology, Scanning electron microscopy, Design and modelling, Metrology, Semiconducting wafers, Visibility, Shrinkage, Optical metrology, Design rules, Calibration

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years