Mr. Ryan Hsieh Profile

Ryan Hsieh

at Applied Materials Taiwan Ltd

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Publications (1)

Proceedings Article | 30 April 2023 Poster

SEM overlay target design using e-beam simulation

Kevin Houchens, Yaniv Abramovitz, Shay Attal, Ofer Adan, Nahum Bomshtein, Itai Buks, Ryan Hsieh, Tal Itzkovich, Jenny Perry

Proceedings Volume 12496, 1249623 (2023) https://doi.org/10.1117/12.2669984

KEYWORDS: Overlay metrology, Scanning electron microscopy, Design and modelling, Metrology, Semiconducting wafers, Visibility, Shrinkage, Optical metrology, Design rules, Calibration

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