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Loren Gastian
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Publications (1)
Proceedings Article | 4 October 2023 Presentation
Fabrication of high aspect ratio structures for meta-surface optics
Proceedings Volume PC12646, PC126460T (2023) https://doi.org/10.1117/12.2678379
KEYWORDS: Fabrication, Etching, Electron beam lithography, Dielectrics, Defense and security, Silicon, Organization management, Nanotechnology, Materials processing, Lithography
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