Dr. Piotr Zalicki Profile

Dr. Piotr Zalicki

System Designer at KLA Corp

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Publications (2)

Proceedings Article | 2 June 2000 Paper

Manufacturing considerations for implementation of scatterometry for process monitoring

John Allgair, David Benoit, Robert Hershey, Lloyd Litt, Ibrahim Abdulhalim, William Braymer, Michael Faeyrman, John Robinson, Umar Whitney, Yiping Xu, Piotr Zalicki, Joel Seligson

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386465

KEYWORDS: Scatterometry, Reflectivity, Scanning electron microscopy, Critical dimension metrology, Metrology, Silicon, Atomic force microscopy, Manufacturing, Process control, Semiconducting wafers

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Proceedings Article | 24 September 1993 Paper

Internal energy distribution in Na2 supersonic beam

Piotr Zalicki, Nicolas Billy, G. Gouedard, Jaques Vigue

Proceedings Volume 1711, (1993) https://doi.org/10.1117/12.155646

KEYWORDS: Molecules, Molecular beams, Laser induced fluorescence, Spectroscopy, Sodium, Luminescence, Quantum efficiency, Physics, Chemical species, Continuous wave operation

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