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Sunyoung Kim
at SAMSUNG Electronics Co Ltd
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Author
Publications (2)
Proceedings Article | 12 November 2024 Presentation + Paper
PEC parameter optimization for EUV short-range effect utilizing MPC model calibration techniques
Yohei Torigoe, Itaru Ono, Ahmad Syukri, Yutaro Sato, Sun Young Kim, Boram Lee, Sukho Lee, Eok Bong Kim, Sanghee Lee
Proceedings Volume 13216, 132160K (2024) https://doi.org/10.1117/12.3034490
KEYWORDS: Calibration, Backscatter, Critical dimension metrology, Photomasks, Mathematical optimization, Extreme ultraviolet, Mathematical modeling, Manufacturing
Proceedings Article | 29 September 2023 Paper
New multi-beam mask data preparation method for EUV high volume data
Kyungsup Shin, Sunyoung Kim, Jihyeon Choi, Eokbong Kim, Sanghee Lee, Harald Hoeller-Lugmayr, Amir Moqanaki, Annette Schnettelker, Mathias Tomandl, Christof Zillner, Yohei Torigoe, Taigo Fujii, Ryunosuke Miyake, Mizuki Odaka, Issei Masumoto, Masakazu Hamaji
Proceedings Volume 12915, 129150D (2023) https://doi.org/10.1117/12.2683168
KEYWORDS: Extreme ultraviolet, Design and modelling, Electronic design automation, Algorithm development, Mathematical optimization, Data conversion, Product engineering, Optical proximity correction, Nanofabrication, Lithography
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