Dr. Benedicte P. Mortini
at STMicroelectronics
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 26 March 2019 Presentation + Paper
Nacima Allouti, Pierre Chevalier, Sébastien Bérard-Bergery, Valérie Rousset, Benedicte Mortini, Patrick Quéméré, Florian Tomaso, Rémi Coquand
Proceedings Volume 10958, 1095809 (2019) https://doi.org/10.1117/12.2514712
KEYWORDS: Microlens, Photomasks, Grayscale lithography, Chromium, Lithography, Photoresist processing, Annealing, Oxygen, Optical lithography, Atomic force microscopy

Proceedings Article | 30 March 2010 Paper
S. Audran, J. Vaillant, V. Farys, F. Hirigoyen, E. Huss, B. Mortini, C. Cowache, L. Berthier, E. Mortini, J. Fantuz, O. Arnaud, L. Depoyan, F. Sundermann, C. Baron, J.-P. Reynard
Proceedings Volume 7639, 763910 (2010) https://doi.org/10.1117/12.846507
KEYWORDS: Microlens, Photomasks, Calibration, Spherical lenses, Atomic force microscopy, Grayscale lithography, Image processing, Photoresist processing, Photoresist materials, Diffusion

Proceedings Article | 15 April 2008 Paper
Arnaud Bazin, Erwine Pargon, Xavier Mellhaoui, Damien Perret, Bénédicte Mortini, Olivier Joubert
Proceedings Volume 6923, 692337 (2008) https://doi.org/10.1117/12.772573
KEYWORDS: Plasma treatment, Etching, Argon, Resistance, Photoresist materials, Plasma, Polymers, FT-IR spectroscopy, Photoresist processing, Ellipsometry

Proceedings Article | 16 May 2007 Paper
C. Petitdidier, R. Tiron, S. Derrough, C. Sourd, L. Koscianski, B. Mortini
Proceedings Volume 6591, 65910I (2007) https://doi.org/10.1117/12.724202
KEYWORDS: Glasses, Polymethylmethacrylate, Polymers, Temperature metrology, Thin films, Lithography, Silicon films, Polymer thin films, Silicon, Microelectronics

Proceedings Article | 3 May 2007 Paper
Raluca Tiron, Claire Sourd, Hervé Fontaine, Sylviane Cetre, Bénédicte Mortini
Proceedings Volume 6533, 65331E (2007) https://doi.org/10.1117/12.736532
KEYWORDS: Lithography, FT-IR spectroscopy, Polymers, Photoresist processing, Spectroscopy, Semiconducting wafers, Contamination, Quartz, Helium, Chemical analysis

Showing 5 of 17 publications
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