Mr. Daniel Harel Profile

Daniel Harel

at Applied Materials

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Publications (2)

Proceedings Article | 24 March 2020 Presentation + Paper

Accelerating on-device overlay metrology accuracy verification

Yaniv Abramovitz, Lior Sarig, Guy Levin, Shimon Levi, Ron Davidescu, Daniel Harel, Ofer Adan, Philippe Leray, Sandip Halder

Proceedings Volume 11325, 1132515 (2020) https://doi.org/10.1117/12.2568682

KEYWORDS: Overlay metrology, Semiconducting wafers, Scanning electron microscopy, Photomasks, Metrology, Wafer-level optics, Etching, Transmission electron microscopy

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Proceedings Article | 23 March 2009 Paper

Process variation monitoring (PVM) by wafer inspection tool as a complementary method to CD-SEM for mapping LER and defect density on production wafers

Saar Shabtay, Yuval Blumberg, Shimon Levi, Gadi Greenberg, Daniel Harel, Amiad Conley, Doron Meshulach, Kobi Kan, Ido Dolev, Surender Kumar, Kalia Mendel, Kaori Goto, Naoaki Yamaguchi, Yasuhiro Iriuchijima, Shinichi Nakamura, Shirou Nagaoka, Toshiyuki Sekito

Proceedings Volume 7272, 72720O (2009) https://doi.org/10.1117/12.814063

KEYWORDS: Semiconducting wafers, Line edge roughness, Wafer inspection, Finite element methods, Polarization, Inspection, Critical dimension metrology, Deep ultraviolet, Metrology, Process control

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