Guy Levin
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 June 2020 Presentation + Paper
Proceedings Volume 11325, 1132508 (2020) https://doi.org/10.1117/12.2563606
KEYWORDS: Overlay metrology, Scanning electron microscopy, Scanning transmission electron microscopy, Wafer-level optics, Semiconducting wafers, Line edge roughness, Photomasks, Transmission electron microscopy, Dysprosium, Metrology

Proceedings Article | 24 March 2020 Presentation + Paper
Proceedings Volume 11325, 1132515 (2020) https://doi.org/10.1117/12.2568682
KEYWORDS: Overlay metrology, Semiconducting wafers, Scanning electron microscopy, Photomasks, Metrology, Wafer-level optics, Etching, Transmission electron microscopy

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