Dr. Hangyeol Park Profile

Dr. Hangyeol Park

at ASML Korea Co Ltd

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Author

Publications (4)

Proceedings Article | 10 April 2024 Poster + Paper

Multi-wavelength continuous-bias DBO metrology for improved ADI process-robustness

Jungmin Lee, Inbeom Lim, Byeong Seon Park, Changyeon Lee, Mincheol Kwak, Jeongjin Lee, Seung Yoon Lee, Chan Hwang, Jay Mummery, Bruno Gregorio Almeida, Han-Gyeol Park, Mi-Yeon Baek, Kemal Dahha, Ki-Youn Lee, Se-Hui Lee, Arno van Leest, Thao Nguyen, Marc Noot, Stefan Smith-Meerman, Koen van Witteveen, Jong-Hyuk Yim, Olger Zwier

Proceedings Volume 12955, 129553P (2024) https://doi.org/10.1117/12.3012950

KEYWORDS: Overlay metrology, Signal to noise ratio, Denoising, Semiconducting wafers, Metrology, Inspection, Phase shifts, Optical gratings, Industrial applications, Diffraction

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Proceedings Article | 27 April 2023 Presentation + Paper

Using active asymmetry control and blind source separation to improve the accuracy of after develop overlay measurements

Jungmin Lee, Doogyu Lee, Eunji Lee, Inbeom Yim, Jeongjin Lee, Seung Yoon Lee, Chan Hwang, Marc Noot, Arno van Leest, Simon Mathijssen, Yao Gao, Seung-Bin Yang, Mi-Yeon Baek, Do-Haeng Lee, Han-Gyeol Park, Jong-Hyuk Yim, Thomas Kim, Ho-Hyuk Lee, Kemal Dahha, Stefan Smith-Meerman, Koen van Witteveen, Elliott McNamara, Matthew McLaren

Proceedings Volume 12496, 124960H (2023) https://doi.org/10.1117/12.2658330

KEYWORDS: Semiconducting wafers, Overlay metrology, Metrology, Matrices, Polarization, Wafer testing, Signal processing, Independent component analysis, Education and training, Diffraction

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Proceedings Article | 15 February 2021 Poster + Presentation + Paper

Development of microfocus x-ray source based on CNT emitter for intraoperative specimen radiographic system

Amar Prasad Gupta, Seung Jun Yeo, Jaekyu Jang, Jaeik Jung, Jinho Choi, Jongmin Lim, Wooseob Kim, Junyoung Park, Hangyeol Park, Moon Shik Chae, Yeong Heum Yeon, Jeung Sun Ahn, Seung Hoon Kim, Namkug Kim, Beomseok Ko, Jehwang Ryu

Proceedings Volume 11595, 115953J (2021) https://doi.org/10.1117/12.2582087

KEYWORDS: X-ray sources, X-rays, Breast, Target detection, Chemical vapor deposition, Metals, Detector development, Carbon nanotubes

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Proceedings Article | 15 February 2021 Poster + Presentation + Paper

X-ray tube based on carbon nanotube field emitter for low dose mini C-arm fluoroscopy

Jongmin Lim, Amar P. Gupta, Hangyeol Park, Jinho Choi, Jaeik Jung, Jaekyu Jang, Seung Jun Yeo, Jeung Sun Ahn, Byeong-No Lee, Moon Shik Chae, Jehwang Ryu

Proceedings Volume 11595, 1159539 (2021) https://doi.org/10.1117/12.2582090

KEYWORDS: Fluoroscopy, X-rays, Carbon nanotubes, X-ray sources, Image acquisition, Carbon, X-ray imaging, Switching, Safety, Electrons

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