Dr. Licai Jiang Profile

Dr. Licai Jiang

President, COO at Rigaku Innovative Technologies Inc

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 26 August 2015 Paper

Beam conditioning multilayer optics for laboratory x-ray sources

Yuriy Platonov, Boris Verman, Licai Jiang, Bonglea Kim

Proceedings Volume 9590, 95900B (2015) https://doi.org/10.1117/12.2196352

KEYWORDS: Multilayers, X-ray optics, Reflectivity, Mirrors, Optics manufacturing, X-rays, X-ray sources, Optical design, Crystals, Grazing incidence

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Proceedings Article | 17 April 2014 Paper

Improved measurement capabilities at the NIST EUV reflectometry facility

C. Tarrio, S. Grantham, T. Germer, J. Rife, T. Lucatorto, M. Kriese, Y. Platonov, L. Jiang, J. Rodriguez

Proceedings Volume 9048, 90481I (2014) https://doi.org/10.1117/12.2046290

KEYWORDS: Sensors, Extreme ultraviolet, Reflectometry, Polarization, Radiation effects, Reflectivity, Motion models, EUV optics, 3D modeling, Data modeling

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Proceedings Article | 18 March 2014 Paper

Development of an EUVL collector with infrared radiation suppression

Michael Kriese, Yuriy Platonov, Bodo Ehlers, Licai Jiang, Jim Rodriguez, Ulrich Mueller, Jay Daniel, Shayna Khatri, Adam Magruder, Steven Grantham, Charles Tarrio, Thomas Lucatorto

Proceedings Volume 9048, 90483C (2014) https://doi.org/10.1117/12.2049279

KEYWORDS: Extreme ultraviolet, Reflectivity, Infrared radiation, Extreme ultraviolet lithography, Plasma, Infrared technology, Neodymium, Nickel, Surface finishing, Diffraction gratings

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