Dr. Toshiyuki Ogata Profile

Dr. Toshiyuki Ogata

Director at Taiyo Holdings Co., Ltd.

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Publications (8)

Proceedings Article | 16 April 2011 Paper

Polymer-bound photobase generators and photoacid generators for pitch division lithography

Younjin Cho, Xinyu Gu, Yuji Hagiwara, Takanori Kawakami, Toshiyuki Ogata, Brandon Rawlings, Yongjun Li, Arun Sundaresan, Nicholas Turro, Robert Bristol, James Blackwell, C. Grant Willson

Proceedings Volume 7972, 797221 (2011) https://doi.org/10.1117/12.879771

KEYWORDS: Polymers, Lithography, Line edge roughness, NOx, Analog electronics, Photomasks, Polymerization, Chlorine, Molecules, Ultraviolet radiation

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Proceedings Article | 16 April 2011 Paper

Photobase generator enabled pitch division: a progress report

Xinyu Gu, Younjin Cho, Takanori Kawakami, Yuji Hagiwara, Brandon Rawlings, Ryan Mesch, Toshiyuki Ogata, Taeho Kim, Takehiro Seshimo, Wade Wang, Arun Sundaresan, Nicholas Turro, Roel Gronheid, James Blackwell, Robert Bristol, C. Grant Willson

Proceedings Volume 7972, 79720F (2011) https://doi.org/10.1117/12.879861

KEYWORDS: Line edge roughness, Polymers, Lithography, Diffusion, Optical lithography, Photomasks, Chemical analysis, Scanning electron microscopy, Absorbance, Chemistry

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Proceedings Article | 26 March 2010 Paper

Photobase generator assisted pitch division

Xinyu Gu, Christopher Bates, Younjin Cho, Takanori Kawakami, Tomoki Nagai, Toshiyuki Ogata, Arunkumar Sundaresan, Nicholas Turro, Robert Bristol, Paul Zimmerman, C. Grant Willson

Proceedings Volume 7639, 763906 (2010) https://doi.org/10.1117/12.846395

KEYWORDS: Lithography, Photomasks, Critical dimension metrology, Photoresist materials, Manufacturing, Polymers, Semiconductors, Double patterning technology, Image processing, Interferometry

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Proceedings Article | 1 April 2009 Paper

Optical threshold layer and intermediate state two-photon PAG approaches to double exposure lithography

Adam Berro, Xinyu Gu, Naphtali O'Connor, Steffen Jockusch, Tomoki Nagai, Toshiyuki Ogata, Paul Zimmerman, Bryan Rice, Elizabeth Adolph, Travis Byargeon, Jose Gonzalez, Nicholas Turro, C. Grant Willson

Proceedings Volume 7273, 72731B (2009) https://doi.org/10.1117/12.814295

KEYWORDS: Polymers, Liquids, Liquid crystals, Crystals, Lithography, Molecules, Absorption, Diffusion, Nitrogen, Absorbance

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Proceedings Article | 1 April 2009 Paper

Fundamental study of optical threshold layer approach towards double exposure lithography

Xinyu Gu, Adam Berro, Younjin Cho, Kane Jen, Saul Lee, Tomoki Ngai, Toshiyuki Ogata, William Durand, Arunkumar Sundaresan, Jeffrey Lancaster, Steffen Jockusch, Paul Zimmerman, Nicholas Turro, C. Willson

Proceedings Volume 7273, 72731C (2009) https://doi.org/10.1117/12.814298

KEYWORDS: Polymers, Lithography, Crystals, Diffusion, Temperature metrology, Extreme ultraviolet lithography, Sensors, Polymer thin films, Optical lithography, Photomasks

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Proceedings Article | 29 March 2006 Paper

Characteristics of low E_a 193-nm chemical amplification resists

Toshiyuki Ogata, Yohei Kinoshita, Sanae Furuya, Shogo Matsumaru, Motoki Takahashi, Daiju Shiono, Takahiro Dazai, Hideo Hada, Masamitsu Shirai

Proceedings Volume 6153, 615328 (2006) https://doi.org/10.1117/12.656199

KEYWORDS: Polymers, Plasma, Argon, Printing, Surface roughness, Lithography, FT-IR spectroscopy, Scanning electron microscopy, Photoresist processing, Electroluminescence

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Proceedings Article | 4 May 2005 Paper

Development of electron beam resists based on amorphous polyphenols with low molecular weight and narrow dispersion

Taku Hirayama, Daiju Shiono, Shogo Matsumaru, Toshiyuki Ogata, Hideo Hada, Junichi Onodera, Tadashi Arai, Toshio Sakamizu, Atsuko Yamaguchi, Hiroshi Shiraishi, Hiroshi Fukuda, Mitsuru Ueda

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600416

KEYWORDS: Line edge roughness, Ions, Scanning electron microscopy, Lithography, Etching, Polymers, Electron beams, Silicon, Semiconducting wafers, Inspection

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Proceedings Article | 24 August 2001 Paper

New polymer for 157-nm single-layer resist based on fluorine-containing acryl copolymer

Toshiyuki Ogata, Koutaro Endo, Hiroshi Komano, Toshimasa Nakayama

Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436862

KEYWORDS: Polymers, Etching, Absorbance, Polymerization, Resistance, Lithography, Transparency, Absorption, Chemical analysis, Spectrophotometry

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Showing 5 of 8 publications

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