Dr. Roman M. Klein Profile

Dr. Roman M. Klein

Staff Scientist at Physikalisch-Technische Bundesanstalt

SPIE Involvement:

Author

Publications (14)

Proceedings Article | 29 August 2017 Presentation + Paper

The VUV instrument SPICE for Solar Orbiter: performance ground testing

Martin Caldwell, Nigel Morris, Douglas Griffin, Paul Eccleston, Mark Anderson, Carmen Pastor Santos, Davide Bruzzi, Samuel Tustain, Chris Howe, Jenny Davenne, Timothy Grundy, Roisin Speight, Sunil Sidher, Alessandra Giunta, Andrzej Fludra, Anne Philippon, Frederic Auchere, Don Hassler, Joseph Davila, William Thompson, Udo Schuehle, Stefan Meining, Buddy Walls, P. Phelan, Greg Dunn, Roman Klein, Thomas Reichel, Manfred Gyo, Grant Munro, William Holmes, Peter Doyle

Proceedings Volume 10397, 1039708 (2017) https://doi.org/10.1117/12.2272980

KEYWORDS: Vacuum ultraviolet, Imaging spectroscopy, Atmospheric plasma, Spectroscopes, Imaging systems, Atmospheric sciences, Sun, Spatial resolution, Instrument modeling, Spectroscopy

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SPIE Journal Paper | 23 November 2016

Source-based calibration of space instruments using calculable synchrotron radiation

Roman Klein, Rolf Fliegauf, Simone Kroth, Wolfgang Paustian, Thomas Reichel, Mathias Richter, Reiner Thornagel

JATIS, Vol. 2, Issue 04, 044002, (November 2016) https://doi.org/10.1117/12.10.1117/1.JATIS.2.4.044002

KEYWORDS: Calibration, Aerospace engineering, Synchrotron radiation, Ultraviolet radiation, Vacuum ultraviolet, Space telescopes, Electron beams, Spectrographs, Spectroscopy, X-rays

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Proceedings Article | 26 September 2013 Paper

SPICE EUV spectrometer for the Solar Orbiter mission

A. Fludra, D. Griffin, M. Caldwell, P. Eccleston, J. Cornaby, D. Drummond, W. Grainger, P. Greenway, T. Grundy, C. Howe, C. McQuirk, K. Middleton, O. Poyntz-Wright, A. Richards, K. Rogers, C. Sawyer, B. Shaughnessy, S. Sidher, I. Tosh, S. Beardsley, G. Burton, A. Marshall, N. Waltham, S. Woodward, T. Appourchaux, A. Philippon, F. Auchere, E. Buchlin, A. Gabriel, J.-C. Vial, U. Schühle, W. Curdt, D. Innes, S. Meining, H. Peter, S. Solanki, L. Teriaca, M. Gyo, V. Büchel, M. Haberreiter, D. Pfiffner, W. Schmutz, M. Carlsson, S. Haugan, J. Davila, P. Jordan, W. Thompson, D. Hassler, B. Walls, C. Deforest, J. Hanley, J. Johnson, P. Phelan, L. Blecha, H. Cottard, G. Paciotti, N. Autissier, Y. Allemand, K. Relecom, G. Munro, A. Butler, R. Klein, A. Gottwald

Proceedings Volume 8862, 88620F (2013) https://doi.org/10.1117/12.2027581

KEYWORDS: Mirrors, Sensors, Solar processes, Spectroscopy, Space operations, Plasmas, Sun, Extreme ultraviolet, Space telescopes, Telescopes

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Proceedings Article | 20 May 2004 Paper

Linearity of silicon photodiodes for EUV radiation

Frank Scholze, Roman Klein, Ralph Mueller

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.532151

KEYWORDS: Diodes, Photodiodes, Resistance, Extreme ultraviolet, Sensors, Calibration, Silicon, Electrodes, Optical filters, Synchrotron radiation

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Proceedings Article | 20 May 2004 Paper

Metrology tools for EUV-source characterization and optimization

Thomas Missalla, Max Schuermann, Rainer Lebert, Christian Wies, Larissa Juschkin, Roman Klein, Frank Scholze, Gerhard Ulm, Andre Egbert, Boris Tkachenko, Boris Chichkov

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.556521

KEYWORDS: Calibration, Extreme ultraviolet, Sensors, Diodes, Metrology, Spectrographs, Optical filters, Extreme ultraviolet lithography, Transmittance, Mirrors

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Proceedings Article | 16 June 2003 Paper

EUV time-resolved studies on carbon growth and cleaning

Bas Mertens, Bas Wolschrijn, Rik Jansen, Norbert Koster, Markus Weiss, Marco Wedowski, Roman Klein, Thomas Bock, Reiner Thornagel

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.504542

KEYWORDS: Reflection, Carbon, Mirrors, Extreme ultraviolet, Contamination, Oxygen, Reflectivity, Reflectometry, Extreme ultraviolet lithography, Oxidation

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Proceedings Article | 16 June 2003 Paper

Metrology tools for EUVL-source characterization and optimization

Max Schuermann, Thomas Missalla, Klaus Mann, Sebastian Kranzusch, Roman Klein, Frank Scholze, Gerhard Ulm, Rainer Lebert, Larissa Juschkin

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482667

KEYWORDS: Calibration, Extreme ultraviolet, Mirrors, Extreme ultraviolet lithography, Plasma, Metrology, Optical filters, Spectrographs, Photodiodes, Multilayers

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Proceedings Article | 24 December 2002 Paper

Irradiation of EUV multilayer optics with synchrotron radiation of a different time structure

Roman Klein, Frank Scholze, R. Thornagel, Johannes Tummler, M. Wedowski, R. Jansen, B. Mertens, A. van de Runstraat, Gerhard Ulm

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.451352

KEYWORDS: Synchrotron radiation, Reflectivity, Mirrors, Electron beams, Extreme ultraviolet, Extreme ultraviolet lithography, Optical filters, EUV optics, Contamination, Radio optics

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Proceedings Article | 20 December 2001 Paper

Prevention of MoSi multilayer reflection loss in EUVL tools

Hans Meiling, Bas Mertens, Frank Stietz, Marco Wedowski, Roman Klein, Ralph Kurt, Eric Louis, Andrey Yakshin

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450949

KEYWORDS: Carbon, Extreme ultraviolet lithography, Mirrors, Extreme ultraviolet, Reflectivity, Bioalcohols, Oxygen, Reflection, Silicon, Oxidation

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Proceedings Article | 20 December 2001 Paper

Lifetime testing of EUV optics using intense synchrotron radiation at the PTB Radiometry Laboratory

Roman Klein, Alexander Gottwald, Frank Scholze, R. Thornagel, Johannes Tuemmler, Gerhard Ulm, Marco Wedowski, Frank Stietz, Bas Mertens, Norbert Koster, J. van Elp

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450950

KEYWORDS: Mirrors, Reflectivity, Extreme ultraviolet, EUV optics, Optical filters, Extreme ultraviolet lithography, Synchrotron radiation, Radiometry, Lithography, Reflectometry

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Proceedings Article | 22 August 2001 Paper

High-accuracy EUV metrology of PTB using synchrotron radiation

Frank Scholze, Burkhard Beckhoff, G. Brandt, R. Fliegauf, Alexander Gottwald, Roman Klein, Bernd Meyer, U. Schwarz, R. Thornagel, Johannes Tuemmler, Klaus Vogel, J. Weser, Gerhard Ulm

Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436766

KEYWORDS: Mirrors, Extreme ultraviolet, Metrology, Monochromators, Reflectometry, Sensors, Diffraction, Radiometry, Reflectivity, Optical filters

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Proceedings Article | 8 November 2000 Paper

Multilayer reflectance during exposure to EUV radiation

Sebastian Oestreich, Roman Klein, Frank Scholze, Jeroen Jonkers, Eric Louis, Andrey Yakshin, Peter Goerts, Gerhard Ulm, Markus Haidl, Fred Bijkerk

Proceedings Volume 4146, (2000) https://doi.org/10.1117/12.406677

KEYWORDS: Mirrors, Reflectivity, Extreme ultraviolet lithography, Ozone, Multilayers, Extreme ultraviolet, Contamination, Carbon, Ultraviolet radiation, Chlorine

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Proceedings Article | 8 November 2000 Paper

New PTB beamlines for high-accuracy EUV reflectometry at BESSY II

Frank Scholze, Burkhard Beckhoff, G. Brandt, R. Fliegauf, Roman Klein, Bernd Meyer, D. Rost, Detlef Schmitz, M. Veldkamp, J. Weser, Gerhard Ulm, Eric Louis, Andrey Yakshin, Sebastian Oestreich, Fred Bijkerk

Proceedings Volume 4146, (2000) https://doi.org/10.1117/12.406678

KEYWORDS: Mirrors, Reflectivity, Reflectometry, Extreme ultraviolet, Monochromators, Diodes, Sensors, Electron beams, Optical components, Coating

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