Dr. Sarah Bollanti
at ENEA
SPIE Involvement:
Author
Publications (38)

Proceedings Article | 13 April 2020 Presentation + Paper
Proceedings Volume 11352, 1135216 (2020) https://doi.org/10.1117/12.2555747
KEYWORDS: Sun, Sensors, Magnetism, Global Positioning System, Calibration

Proceedings Article | 3 January 2019 Paper
L. Mezi, S. Bollanti, S. Botti, G. Brusatin, L. Businaro, G. Della Giustina, P. Di Lazzaro, M. Fagnoni, F. Flora, A. Gerardino, D. Murra, S. Protti, A. Torre, E. Torti
Proceedings Volume 11042, 110420Z (2019) https://doi.org/10.1117/12.2522469
KEYWORDS: Extreme ultraviolet, Plasma, Graphene, Photomasks, Optical lithography, Extreme ultraviolet lithography, Spatial resolution, Silicon, Photoresist materials, Lithography

Proceedings Article | 30 January 2013 Paper
Proceedings Volume 8677, 86770T (2013) https://doi.org/10.1117/12.2010400
KEYWORDS: Extreme ultraviolet, Laser induced fluorescence, Extreme ultraviolet lithography, Photomasks, Patents, Microscopes, Luminescence, Transistors, Ultraviolet radiation, Adhesives

Proceedings Article | 22 April 2009 Paper
Proceedings Volume 7131, 713116 (2009) https://doi.org/10.1117/12.816912
KEYWORDS: Mirrors, Extreme ultraviolet, Photomasks, Projection lithography, Plasmas, Projection systems, X-ray sources, Krypton, Laser development, Optical filters

Proceedings Article | 2 October 2007 Paper
S. Bollanti, D. Amodio, A. Conti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre, C. Zheng, D. Garoli, M. Pelizzo, P. Nicolosi, V. Mattarello, V. Rigato, A. Gerardino
Proceedings Volume 6703, 670308 (2007) https://doi.org/10.1117/12.751442
KEYWORDS: Mirrors, Krypton, Argon, Extreme ultraviolet, Fluctuations and noise, Reflectivity, Plasma, Extreme ultraviolet lithography, Glasses, Copper

Showing 5 of 38 publications
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